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Title: X-ray transmissive debris shield

Abstract

An X-ray debris shield for use in X-ray lithography that is comprised of an X-ray window having a layer of low density foam exhibits increased longevity without a substantial increase in exposure time. The low density foam layer serves to absorb the debris emitted from the X-ray source and attenuate the shock to the window so as to reduce the chance of breakage. Because the foam is low density, the X-rays are hardly attenuated by the foam and thus the exposure time is not substantially increased.

Inventors:
Publication Date:
Research Org.:
AT&T Corporation
OSTI Identifier:
238067
Patent Number(s):
US 5,519,752/A/
Application Number:
PAN: 8-322,533
Assignee:
Sandia Corp., Albuquerque, NM (United States) SNL; SCA: 320303; 426000; PA: EDB-96:093149; SN: 96001594377
DOE Contract Number:
AC04-76DP00789
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 21 May 1996
Country of Publication:
United States
Language:
English
Subject:
32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; INTEGRATED CIRCUITS; FABRICATION; EQUIPMENT; SHIELDS; X RADIATION; MASKING; ABSORPTION; ATTENUATION; SHOCK WAVES; MANUFACTURING

Citation Formats

Spielman, R.B. X-ray transmissive debris shield. United States: N. p., 1996. Web.
Spielman, R.B. X-ray transmissive debris shield. United States.
Spielman, R.B. 1996. "X-ray transmissive debris shield". United States. doi:.
@article{osti_238067,
title = {X-ray transmissive debris shield},
author = {Spielman, R.B.},
abstractNote = {An X-ray debris shield for use in X-ray lithography that is comprised of an X-ray window having a layer of low density foam exhibits increased longevity without a substantial increase in exposure time. The low density foam layer serves to absorb the debris emitted from the X-ray source and attenuate the shock to the window so as to reduce the chance of breakage. Because the foam is low density, the X-rays are hardly attenuated by the foam and thus the exposure time is not substantially increased.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = 1996,
month = 5
}
  • A composite window structure is described for transmitting x-ray radiation and for shielding radiation generated debris. In particular, separate layers of different x-ray transmissive materials are laminated together to form a high strength, x-ray transmissive debris shield which is particularly suited for use in high energy fluences. In one embodiment, the composite window comprises alternating layers of beryllium and a thermoset polymer.
  • An X-ray debris shield for use in X-ray lithography that is comprised of an X-ray window having a layer of low density foam exhibits increased longevity without a substantial increase in exposure time. The low density foam layer serves to absorb the debris emitted from the X-ray source and attenuate the shock to the window so as to reduce the chance of breakage. Because the foam is low density, the X-rays are hardly attenuated by the foam and thus the exposure time is not substantially increased.
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