skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Silicon-containing diamond like-carbon coatings formed by ion beam assisted deposition (IBAD): Processing and properties of a new category of hard, wear resistant thin films

Abstract

Amorphous silicon-containing diamond like-carbon Si-DLQ coatings were formed by thermal evaporation of a tetraphenyl-tetramethyl-trisiloxane ((C{sub 6}H{sub 5}){sub 4}(CH{sub 3}){sub 4}Si{sub 3}O{sub 2}) diffusion pump oil (Dow Corning 704) onto silicon and steel substrates with simultaneous bombardment of the growing film with 40 keV Ar{sup +} ions to decompose the (C{sub 6}H{sub 5}){sub 4}(CH{sub 3}){sub 4}Si{sub 3}O{sub 2} molecules. Both the current density of the ion beam and the oil arrival rate were varied to produce hard, adhesive films on room temperature substrates, with densities ranging from 1.4 to 2.3 g/cm{sup 3} and Knoop microhardness values (at 15 g load) from 1000 to 2100 MPa.

Authors:
; ;  [1]
  1. Univ. of Connecticut, Storrs, CT (United States); and others
Publication Date:
OSTI Identifier:
230180
Report Number(s):
CONF-950840-
TRN: 96:000433-0183
Resource Type:
Conference
Resource Relation:
Conference: International conference on applications of diamond films and related materials, Gaithersburg, MD (United States), 21-24 Aug 1995; Other Information: PBD: 1995; Related Information: Is Part Of Applications of diamond films and related materials: Third international conference; Feldman, A.; Yarbrough, W.A.; Murakawa, Masao; Tzeng, Yonhua; Yoshikawa, Masanori [eds.]; PB: 973 p.
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; SILICON; WEAR RESISTANCE; SURFACE COATING; DIAMONDS; STEELS; ADHESION; EVAPORATION; FRICTION; MICROHARDNESS; PROCESSING; THIN FILMS; ENERGY BEAM DEPOSITION FILMS

Citation Formats

Fountzoulas, C G, Demaree, J D, and Hirvonen, J K. Silicon-containing diamond like-carbon coatings formed by ion beam assisted deposition (IBAD): Processing and properties of a new category of hard, wear resistant thin films. United States: N. p., 1995. Web.
Fountzoulas, C G, Demaree, J D, & Hirvonen, J K. Silicon-containing diamond like-carbon coatings formed by ion beam assisted deposition (IBAD): Processing and properties of a new category of hard, wear resistant thin films. United States.
Fountzoulas, C G, Demaree, J D, and Hirvonen, J K. Sun . "Silicon-containing diamond like-carbon coatings formed by ion beam assisted deposition (IBAD): Processing and properties of a new category of hard, wear resistant thin films". United States.
@article{osti_230180,
title = {Silicon-containing diamond like-carbon coatings formed by ion beam assisted deposition (IBAD): Processing and properties of a new category of hard, wear resistant thin films},
author = {Fountzoulas, C G and Demaree, J D and Hirvonen, J K},
abstractNote = {Amorphous silicon-containing diamond like-carbon Si-DLQ coatings were formed by thermal evaporation of a tetraphenyl-tetramethyl-trisiloxane ((C{sub 6}H{sub 5}){sub 4}(CH{sub 3}){sub 4}Si{sub 3}O{sub 2}) diffusion pump oil (Dow Corning 704) onto silicon and steel substrates with simultaneous bombardment of the growing film with 40 keV Ar{sup +} ions to decompose the (C{sub 6}H{sub 5}){sub 4}(CH{sub 3}){sub 4}Si{sub 3}O{sub 2} molecules. Both the current density of the ion beam and the oil arrival rate were varied to produce hard, adhesive films on room temperature substrates, with densities ranging from 1.4 to 2.3 g/cm{sup 3} and Knoop microhardness values (at 15 g load) from 1000 to 2100 MPa.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {12}
}

Conference:
Other availability
Please see Document Availability for additional information on obtaining the full-text document. Library patrons may search WorldCat to identify libraries that hold this conference proceeding.

Save / Share: