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Title: Kinetics of Atomic Recombination on Silicon Samples in Chlorine Plasma

Abstract

The recombination kinetics of chlorine atoms on the wall of a plasmachemical reactor and on silicon samples in the positive column of a glow discharge in Cl{sub 2} has been studied experimentally. The rate constants and probabilities of the heterogeneous recombination of chlorine atoms on the plasma limiting surfaces, as well as of the chemical interaction of chlorine atoms with silicon, are calculated. The temperature and time dependences of the probabilities of the chemical interaction of chlorine atoms with silicon are analyzed, and optimal conditions for conducting pulse relaxation experiments are determined.

Authors:
;  [1]
  1. Ivanovo State University of Chemistry and Technology (Russian Federation)
Publication Date:
OSTI Identifier:
22763241
Resource Type:
Journal Article
Journal Name:
Plasma Physics Reports
Additional Journal Information:
Journal Volume: 44; Journal Issue: 8; Other Information: Copyright (c) 2018 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1063-780X
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CHLORINE; GLOW DISCHARGES; PLASMA; POSITIVE COLUMN; REACTION KINETICS; RECOMBINATION; SILICON; TIME DEPENDENCE

Citation Formats

Sitanov, D. V., E-mail: sitanov@isuct.ru, and Pivovarenok, S. A., E-mail: sap@isuct.ru. Kinetics of Atomic Recombination on Silicon Samples in Chlorine Plasma. United States: N. p., 2018. Web. doi:10.1134/S1063780X1808007X.
Sitanov, D. V., E-mail: sitanov@isuct.ru, & Pivovarenok, S. A., E-mail: sap@isuct.ru. Kinetics of Atomic Recombination on Silicon Samples in Chlorine Plasma. United States. doi:10.1134/S1063780X1808007X.
Sitanov, D. V., E-mail: sitanov@isuct.ru, and Pivovarenok, S. A., E-mail: sap@isuct.ru. Wed . "Kinetics of Atomic Recombination on Silicon Samples in Chlorine Plasma". United States. doi:10.1134/S1063780X1808007X.
@article{osti_22763241,
title = {Kinetics of Atomic Recombination on Silicon Samples in Chlorine Plasma},
author = {Sitanov, D. V., E-mail: sitanov@isuct.ru and Pivovarenok, S. A., E-mail: sap@isuct.ru},
abstractNote = {The recombination kinetics of chlorine atoms on the wall of a plasmachemical reactor and on silicon samples in the positive column of a glow discharge in Cl{sub 2} has been studied experimentally. The rate constants and probabilities of the heterogeneous recombination of chlorine atoms on the plasma limiting surfaces, as well as of the chemical interaction of chlorine atoms with silicon, are calculated. The temperature and time dependences of the probabilities of the chemical interaction of chlorine atoms with silicon are analyzed, and optimal conditions for conducting pulse relaxation experiments are determined.},
doi = {10.1134/S1063780X1808007X},
journal = {Plasma Physics Reports},
issn = {1063-780X},
number = 8,
volume = 44,
place = {United States},
year = {2018},
month = {8}
}