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Title: Use of the Atomic Structure of Silicon Crystals to Obtain Multi-Tip Field-Emission Sources of Electrons

Abstract

The field-emission properties of field electron sources produced using the atomic structure of silicon crystals, the heterophase vacuum-plasma self-organization of island carbon coatings, and highly anisotropic plasma-chemical etching under weak-adsorption conditions are studied. A correlation between the morphological and field-emission characteristics of field cathode microstructures on silicon crystals with various conductivity types is ascertained. The results of experimental studies are interpreted using the Fowler–Nordheim theory in conjunction with changes in the compositions of the surface phases formed in fabricating emitting silicon projections.

Authors:
 [1]
  1. Russian Academy of Sciences, Saratov Branch, Kotel’nikov Institute of Radio Engineering and Electronics (Russian Federation)
Publication Date:
OSTI Identifier:
22756214
Resource Type:
Journal Article
Journal Name:
Semiconductors
Additional Journal Information:
Journal Volume: 52; Journal Issue: 2; Other Information: Copyright (c) 2018 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1063-7826
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CRYSTALLIZATION; CRYSTALS; ELECTRON SOURCES; FIELD EMISSION; SILICON

Citation Formats

Yafarov, R. K., E-mail: pirpc@yandex.ru. Use of the Atomic Structure of Silicon Crystals to Obtain Multi-Tip Field-Emission Sources of Electrons. United States: N. p., 2018. Web. doi:10.1134/S1063782618020239.
Yafarov, R. K., E-mail: pirpc@yandex.ru. Use of the Atomic Structure of Silicon Crystals to Obtain Multi-Tip Field-Emission Sources of Electrons. United States. doi:10.1134/S1063782618020239.
Yafarov, R. K., E-mail: pirpc@yandex.ru. Thu . "Use of the Atomic Structure of Silicon Crystals to Obtain Multi-Tip Field-Emission Sources of Electrons". United States. doi:10.1134/S1063782618020239.
@article{osti_22756214,
title = {Use of the Atomic Structure of Silicon Crystals to Obtain Multi-Tip Field-Emission Sources of Electrons},
author = {Yafarov, R. K., E-mail: pirpc@yandex.ru},
abstractNote = {The field-emission properties of field electron sources produced using the atomic structure of silicon crystals, the heterophase vacuum-plasma self-organization of island carbon coatings, and highly anisotropic plasma-chemical etching under weak-adsorption conditions are studied. A correlation between the morphological and field-emission characteristics of field cathode microstructures on silicon crystals with various conductivity types is ascertained. The results of experimental studies are interpreted using the Fowler–Nordheim theory in conjunction with changes in the compositions of the surface phases formed in fabricating emitting silicon projections.},
doi = {10.1134/S1063782618020239},
journal = {Semiconductors},
issn = {1063-7826},
number = 2,
volume = 52,
place = {United States},
year = {2018},
month = {2}
}