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Title: Fabrication of Silicon Nanostructures for Application in Photonics

Abstract

Silicon is the primary material of modern electronics. It also possesses bright potentials for applications in nanophotonics. At the same time optical properties of bulk silicon do not fully satisfy requirements imposed on them. Fortunately, properties of silicon nanostructures strongly depend on their shapes and sizes. In this regard, of special interest is the development of fabrication and post-processing methods of silicon nanostructures. In this contribution we propose a method for silicon nanostructures fabrication combining the technique of high-vacuum deposition with metal-assisted chemical etching. SEM images as well as ellipsometry, Raman scattering and optical spectroscopy data prove that the desired structural changes were obtained.

Authors:
; ; ; ; ; ;  [1];  [2]
  1. ITMO University (Russian Federation)
  2. Ioffe Institute (Russian Federation)
Publication Date:
OSTI Identifier:
22749947
Resource Type:
Journal Article
Journal Name:
Semiconductors
Additional Journal Information:
Journal Volume: 52; Journal Issue: 5; Other Information: Copyright (c) 2018 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1063-7826
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; FABRICATION; NANOSTRUCTURES; OPTICAL PROPERTIES; PRESSURE RANGE MICRO PA; PRESSURE RANGE MILLI PA; RAMAN EFFECT; SCANNING ELECTRON MICROSCOPY; SILICON; SYNTHESIS

Citation Formats

Kamalieva, A. N., Toropov, N. A., Vartanyan, T. A., E-mail: Tigran.Vartanyan@mail.ru, Baranov, M. A., Parfenov, P. S., Bogdanov, K. V., Zharova, Y. A., and Tolmachev, V. A. Fabrication of Silicon Nanostructures for Application in Photonics. United States: N. p., 2018. Web. doi:10.1134/S1063782618050135.
Kamalieva, A. N., Toropov, N. A., Vartanyan, T. A., E-mail: Tigran.Vartanyan@mail.ru, Baranov, M. A., Parfenov, P. S., Bogdanov, K. V., Zharova, Y. A., & Tolmachev, V. A. Fabrication of Silicon Nanostructures for Application in Photonics. United States. doi:10.1134/S1063782618050135.
Kamalieva, A. N., Toropov, N. A., Vartanyan, T. A., E-mail: Tigran.Vartanyan@mail.ru, Baranov, M. A., Parfenov, P. S., Bogdanov, K. V., Zharova, Y. A., and Tolmachev, V. A. Tue . "Fabrication of Silicon Nanostructures for Application in Photonics". United States. doi:10.1134/S1063782618050135.
@article{osti_22749947,
title = {Fabrication of Silicon Nanostructures for Application in Photonics},
author = {Kamalieva, A. N. and Toropov, N. A. and Vartanyan, T. A., E-mail: Tigran.Vartanyan@mail.ru and Baranov, M. A. and Parfenov, P. S. and Bogdanov, K. V. and Zharova, Y. A. and Tolmachev, V. A.},
abstractNote = {Silicon is the primary material of modern electronics. It also possesses bright potentials for applications in nanophotonics. At the same time optical properties of bulk silicon do not fully satisfy requirements imposed on them. Fortunately, properties of silicon nanostructures strongly depend on their shapes and sizes. In this regard, of special interest is the development of fabrication and post-processing methods of silicon nanostructures. In this contribution we propose a method for silicon nanostructures fabrication combining the technique of high-vacuum deposition with metal-assisted chemical etching. SEM images as well as ellipsometry, Raman scattering and optical spectroscopy data prove that the desired structural changes were obtained.},
doi = {10.1134/S1063782618050135},
journal = {Semiconductors},
issn = {1063-7826},
number = 5,
volume = 52,
place = {United States},
year = {2018},
month = {5}
}