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Title: Technique for forming ITO films with a controlled refractive index

Abstract

A new method for fabricating transparent conducting coatings based on indium-tin oxide (ITO) with a controlled refractive index is proposed. This method implies the successive deposition of material by electron-beam evaporation and magnetron sputtering. Sputtered coatings with different densities (and, correspondingly, different refractive indices) can be obtained by varying the ratio of the mass fractions of material deposited by different methods. As an example, films with effective refractive indices of 1.2, 1.4, and 1.7 in the wavelength range of 440–460 nm are fabricated. Two-layer ITO coatings with controlled refractive indices of the layers are also formed by the proposed method. Thus, multilayer transparent conducting coatings with desired optical parameters can be produced.

Authors:
; ; ; ; ;  [1]
  1. Russian Academy of Sciences, Ioffe Physical–Technical Institute (Russian Federation)
Publication Date:
OSTI Identifier:
22649734
Resource Type:
Journal Article
Resource Relation:
Journal Name: Semiconductors; Journal Volume: 50; Journal Issue: 7; Other Information: Copyright (c) 2016 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; DENSITY; ELECTRON BEAMS; EVAPORATION; INDIUM COMPOUNDS; LAYERS; MAGNETRONS; REFRACTIVE INDEX; SPUTTERING; SURFACE COATING; THIN FILMS; TIN OXIDES

Citation Formats

Markov, L. K., E-mail: l.markov@mail.ioffe.ru, Smirnova, I. P., Pavluchenko, A. S., Kukushkin, M. V., Zakheim, D. A., and Pavlov, S. I. Technique for forming ITO films with a controlled refractive index. United States: N. p., 2016. Web. doi:10.1134/S1063782616070150.
Markov, L. K., E-mail: l.markov@mail.ioffe.ru, Smirnova, I. P., Pavluchenko, A. S., Kukushkin, M. V., Zakheim, D. A., & Pavlov, S. I. Technique for forming ITO films with a controlled refractive index. United States. doi:10.1134/S1063782616070150.
Markov, L. K., E-mail: l.markov@mail.ioffe.ru, Smirnova, I. P., Pavluchenko, A. S., Kukushkin, M. V., Zakheim, D. A., and Pavlov, S. I. Fri . "Technique for forming ITO films with a controlled refractive index". United States. doi:10.1134/S1063782616070150.
@article{osti_22649734,
title = {Technique for forming ITO films with a controlled refractive index},
author = {Markov, L. K., E-mail: l.markov@mail.ioffe.ru and Smirnova, I. P. and Pavluchenko, A. S. and Kukushkin, M. V. and Zakheim, D. A. and Pavlov, S. I.},
abstractNote = {A new method for fabricating transparent conducting coatings based on indium-tin oxide (ITO) with a controlled refractive index is proposed. This method implies the successive deposition of material by electron-beam evaporation and magnetron sputtering. Sputtered coatings with different densities (and, correspondingly, different refractive indices) can be obtained by varying the ratio of the mass fractions of material deposited by different methods. As an example, films with effective refractive indices of 1.2, 1.4, and 1.7 in the wavelength range of 440–460 nm are fabricated. Two-layer ITO coatings with controlled refractive indices of the layers are also formed by the proposed method. Thus, multilayer transparent conducting coatings with desired optical parameters can be produced.},
doi = {10.1134/S1063782616070150},
journal = {Semiconductors},
number = 7,
volume = 50,
place = {United States},
year = {Fri Jul 15 00:00:00 EDT 2016},
month = {Fri Jul 15 00:00:00 EDT 2016}
}