skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Technique for forming ITO films with a controlled refractive index

Abstract

A new method for fabricating transparent conducting coatings based on indium-tin oxide (ITO) with a controlled refractive index is proposed. This method implies the successive deposition of material by electron-beam evaporation and magnetron sputtering. Sputtered coatings with different densities (and, correspondingly, different refractive indices) can be obtained by varying the ratio of the mass fractions of material deposited by different methods. As an example, films with effective refractive indices of 1.2, 1.4, and 1.7 in the wavelength range of 440–460 nm are fabricated. Two-layer ITO coatings with controlled refractive indices of the layers are also formed by the proposed method. Thus, multilayer transparent conducting coatings with desired optical parameters can be produced.

Authors:
; ; ; ; ;  [1]
  1. Russian Academy of Sciences, Ioffe Physical–Technical Institute (Russian Federation)
Publication Date:
OSTI Identifier:
22649734
Resource Type:
Journal Article
Resource Relation:
Journal Name: Semiconductors; Journal Volume: 50; Journal Issue: 7; Other Information: Copyright (c) 2016 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; DENSITY; ELECTRON BEAMS; EVAPORATION; INDIUM COMPOUNDS; LAYERS; MAGNETRONS; REFRACTIVE INDEX; SPUTTERING; SURFACE COATING; THIN FILMS; TIN OXIDES

Citation Formats

Markov, L. K., E-mail: l.markov@mail.ioffe.ru, Smirnova, I. P., Pavluchenko, A. S., Kukushkin, M. V., Zakheim, D. A., and Pavlov, S. I. Technique for forming ITO films with a controlled refractive index. United States: N. p., 2016. Web. doi:10.1134/S1063782616070150.
Markov, L. K., E-mail: l.markov@mail.ioffe.ru, Smirnova, I. P., Pavluchenko, A. S., Kukushkin, M. V., Zakheim, D. A., & Pavlov, S. I. Technique for forming ITO films with a controlled refractive index. United States. doi:10.1134/S1063782616070150.
Markov, L. K., E-mail: l.markov@mail.ioffe.ru, Smirnova, I. P., Pavluchenko, A. S., Kukushkin, M. V., Zakheim, D. A., and Pavlov, S. I. Fri . "Technique for forming ITO films with a controlled refractive index". United States. doi:10.1134/S1063782616070150.
@article{osti_22649734,
title = {Technique for forming ITO films with a controlled refractive index},
author = {Markov, L. K., E-mail: l.markov@mail.ioffe.ru and Smirnova, I. P. and Pavluchenko, A. S. and Kukushkin, M. V. and Zakheim, D. A. and Pavlov, S. I.},
abstractNote = {A new method for fabricating transparent conducting coatings based on indium-tin oxide (ITO) with a controlled refractive index is proposed. This method implies the successive deposition of material by electron-beam evaporation and magnetron sputtering. Sputtered coatings with different densities (and, correspondingly, different refractive indices) can be obtained by varying the ratio of the mass fractions of material deposited by different methods. As an example, films with effective refractive indices of 1.2, 1.4, and 1.7 in the wavelength range of 440–460 nm are fabricated. Two-layer ITO coatings with controlled refractive indices of the layers are also formed by the proposed method. Thus, multilayer transparent conducting coatings with desired optical parameters can be produced.},
doi = {10.1134/S1063782616070150},
journal = {Semiconductors},
number = 7,
volume = 50,
place = {United States},
year = {Fri Jul 15 00:00:00 EDT 2016},
month = {Fri Jul 15 00:00:00 EDT 2016}
}
  • In this paper, poly (ethyl methacrylate) (PEMA) and (PEMA){sub 0.85}/(ZnO){sub 0.15} nanocomposite films for 2, 3, 4 and 5 minutes have been deposited by spray pyrolysis technique on indium tin oxide (ITO) coated substrate. The effect of thickness of the film on the morphological and optical properties of PEMA and (PEMA){sub 0.85}/(ZnO){sub 0.15} nanocomposite films are studied. The morphological and optical properties of pure PEMA and (PEMA){sub 0.85}/(ZnO){sub 0.15} nanocomposite films are compared. The field emission scanning electron microscopy (FESEM) shows that as the thickness of film increases, uniformity of films increases. It is found from UV-Visible spectra that themore » energy band gap decreases with increasing the deposition time and refractive index increases with increasing the thickness of the film. The band gap of the nanocomposites is found less than the pure polymer film and opposite trend is observed for refractive index. The optical absorption of PEMA/ZnO nanocomposite films is higher than pure PEMA film. The thickness of the nanocomposite film plays a significant role in the tunability of the optical properties.« less
  • A method for controlling the refractive index that is based on the backward rescattering of the scattered and amplified electromagnetic waves is proposed and analysed. The resulting field is a sum of the initial (probe) wave and the rescattered wave. The effective wave number of the total wave can be varied by varying the gain. This variation in the wave number can be treated as a variation in the refractive index, although the physical properties of the medium do not change. The effective refractive index for the total wave propagating in such a device was called the virtual refractive index.more » (nonlinear optical phenomena)« less
  • We describe a new way to measure the refractive index of dielectric materials using a time-resolved correlation method. By measuring the time delay of femtosecond pulse trains through a dielectric material, we obtain the refractive index of the material. This technique is direct, less surface sensitive, and precise to four digits. Consequently, it gives a true bulk index value. We apply this technique to measure the refractive index of fused silica, InP, and GaAs in the near infrared spectral regime. {copyright} {ital 1998 American Institute of Physics.}
  • An experimental test system capable of measuring the refractive index variation of a salt-water solution at two wavelengths, with temporally varying temperature and concentration, is constructed by using a Mach--Zehnder interferometer. An experimental data-reduction method is developed to take the data generated in the experimental test program and to determine the variation of the refractive index with temperature and concentration. The experimental data obtained from the test system are reduced and the results are fitted by using a nonlinear regression algorithm to determine the functional dependence of the refractive index with temperature and concentration.
  • We report the exploitation of a one-laser-shot measurement technique to study photo-induced effects in semiconductor-doped glasses. The technique, based on the use of a phase object in a 4f coherent imaging system, allows one to characterize the kinetics of the nonlinear refractive index of samples versus the light exposure time.