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Title: Formation of silicon nanocrystals in multilayer nanoperiodic a-SiO{sub x}/insulator structures from the results of synchrotron investigations

Abstract

The problem of the efficiency of the controllable formation of arrays of silicon nanoparticles is studied on the basis of detailed investigations of the electronic structure of multilayer nanoperiodic a-SiO{sub x}/SiO{sub 2}, a-SiO{sub x}/Al{sub 2}O{sub 3}, and a-SiO{sub x}/ZrO{sub 2} compounds. Using synchrotron radiation and the X-ray absorption near edge structure (XANES) spectroscopy technique, a modification is revealed for the investigated structures under the effect of high-temperature annealing at the highest temperature of 1100°C; this modification is attributed to the formation of silicon nanocrystals in the layers of photoluminescent multilayer structures.

Authors:
; ;  [1]; ;  [2]; ;  [1]; ;  [2];  [1]
  1. Voronezh State University (Russian Federation)
  2. Lobachevsky State University of Nizhny Novgorod (Russian Federation)
Publication Date:
OSTI Identifier:
22649606
Resource Type:
Journal Article
Resource Relation:
Journal Name: Semiconductors; Journal Volume: 51; Journal Issue: 3; Other Information: Copyright (c) 2017 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY; ABSORPTION SPECTROSCOPY; ANNEALING; EFFICIENCY; ELECTRONIC STRUCTURE; LAYERS; NANOPARTICLES; NANOSTRUCTURES; PHOTOLUMINESCENCE; SILICON; SILICON OXIDES; SYNCHROTRON RADIATION; TEMPERATURE RANGE 0400-1000 K; X-RAY SPECTROSCOPY; ZIRCONIUM OXIDES

Citation Formats

Turishchev, S. Yu., E-mail: tsu@phys.vsu.ru, Terekhov, V. A., Koyuda, D. A., Ershov, A. V., Mashin, A. I., Parinova, E. V., Nesterov, D. N., Grachev, D. A., Karabanova, I. A., and Domashevskaya, E. P. Formation of silicon nanocrystals in multilayer nanoperiodic a-SiO{sub x}/insulator structures from the results of synchrotron investigations. United States: N. p., 2017. Web. doi:10.1134/S1063782617030241.
Turishchev, S. Yu., E-mail: tsu@phys.vsu.ru, Terekhov, V. A., Koyuda, D. A., Ershov, A. V., Mashin, A. I., Parinova, E. V., Nesterov, D. N., Grachev, D. A., Karabanova, I. A., & Domashevskaya, E. P. Formation of silicon nanocrystals in multilayer nanoperiodic a-SiO{sub x}/insulator structures from the results of synchrotron investigations. United States. doi:10.1134/S1063782617030241.
Turishchev, S. Yu., E-mail: tsu@phys.vsu.ru, Terekhov, V. A., Koyuda, D. A., Ershov, A. V., Mashin, A. I., Parinova, E. V., Nesterov, D. N., Grachev, D. A., Karabanova, I. A., and Domashevskaya, E. P. Wed . "Formation of silicon nanocrystals in multilayer nanoperiodic a-SiO{sub x}/insulator structures from the results of synchrotron investigations". United States. doi:10.1134/S1063782617030241.
@article{osti_22649606,
title = {Formation of silicon nanocrystals in multilayer nanoperiodic a-SiO{sub x}/insulator structures from the results of synchrotron investigations},
author = {Turishchev, S. Yu., E-mail: tsu@phys.vsu.ru and Terekhov, V. A. and Koyuda, D. A. and Ershov, A. V. and Mashin, A. I. and Parinova, E. V. and Nesterov, D. N. and Grachev, D. A. and Karabanova, I. A. and Domashevskaya, E. P.},
abstractNote = {The problem of the efficiency of the controllable formation of arrays of silicon nanoparticles is studied on the basis of detailed investigations of the electronic structure of multilayer nanoperiodic a-SiO{sub x}/SiO{sub 2}, a-SiO{sub x}/Al{sub 2}O{sub 3}, and a-SiO{sub x}/ZrO{sub 2} compounds. Using synchrotron radiation and the X-ray absorption near edge structure (XANES) spectroscopy technique, a modification is revealed for the investigated structures under the effect of high-temperature annealing at the highest temperature of 1100°C; this modification is attributed to the formation of silicon nanocrystals in the layers of photoluminescent multilayer structures.},
doi = {10.1134/S1063782617030241},
journal = {Semiconductors},
number = 3,
volume = 51,
place = {United States},
year = {Wed Mar 15 00:00:00 EDT 2017},
month = {Wed Mar 15 00:00:00 EDT 2017}
}