Effect of a DC external electric field on the properties of a nonuniform microwave discharge in hydrogen at reduced pressures
Journal Article
·
· Plasma Physics Reports
- Russian Academy of Sciences, Topchiev Institute of Petrochemical Synthesis (Russian Federation)
The effect of a dc external electrical field on the properties of a highly nonuniform electrode microwave discharge in hydrogen at a pressure of 1 Torr was studied using optical emission spectroscopy and selfconsistent two-dimensional simulations. It is shown that the negative voltage applied to the antenna electrode with respect to the grounded chamber increases the discharge radiation intensity, while the positive voltage does not affect the discharge properties. The simulation results agree well with the experimental data.
- OSTI ID:
- 22614051
- Journal Information:
- Plasma Physics Reports, Vol. 43, Issue 1; Other Information: Copyright (c) 2017 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); ISSN 1063-780X
- Country of Publication:
- United States
- Language:
- English
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