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Title: Nanodisk fabrication by nanosphere lithography

Abstract

Top-down fabrication of regular nanodisk arrays from an A{sub 3}B{sub 5} epitaxial heterostructure containing quantum well is demonstrated. Dry ion etching through the mask was emloyed. The spin-coated monolayer of polystyrene nanospheres served as a mask. Nanodisk diameter could be precisely controlled by oxygen plasma resizing of spheres after deposition. Nanodisks with diameters down to 200 nm were made.

Authors:
; ;  [1]
  1. St.Petersburg State University, 7/9 Universitetskaya nab., St. Petersburg, 199034 (Russian Federation)
Publication Date:
OSTI Identifier:
22609121
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1748; Journal Issue: 1; Conference: STRANN 2016: 5. international conference on state-of-the-art trends of scientific research of artificial and natural nanoobjects, St. Petersburg (Russian Federation), 26-29 Apr 2016; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; DEPOSITION; EPITAXY; ETCHING; FABRICATION; IONS; NANOSTRUCTURES; OXYGEN; POLYSTYRENE; QUANTUM WELLS; SEMICONDUCTOR MATERIALS; SPIN-ON COATING

Citation Formats

Lozhkina, O. A., Lozhkin, M. S., E-mail: maksim.lozhkin@spbu.ru, and Kapitonov, Yu. V. Nanodisk fabrication by nanosphere lithography. United States: N. p., 2016. Web. doi:10.1063/1.4954349.
Lozhkina, O. A., Lozhkin, M. S., E-mail: maksim.lozhkin@spbu.ru, & Kapitonov, Yu. V. Nanodisk fabrication by nanosphere lithography. United States. doi:10.1063/1.4954349.
Lozhkina, O. A., Lozhkin, M. S., E-mail: maksim.lozhkin@spbu.ru, and Kapitonov, Yu. V. Fri . "Nanodisk fabrication by nanosphere lithography". United States. doi:10.1063/1.4954349.
@article{osti_22609121,
title = {Nanodisk fabrication by nanosphere lithography},
author = {Lozhkina, O. A. and Lozhkin, M. S., E-mail: maksim.lozhkin@spbu.ru and Kapitonov, Yu. V.},
abstractNote = {Top-down fabrication of regular nanodisk arrays from an A{sub 3}B{sub 5} epitaxial heterostructure containing quantum well is demonstrated. Dry ion etching through the mask was emloyed. The spin-coated monolayer of polystyrene nanospheres served as a mask. Nanodisk diameter could be precisely controlled by oxygen plasma resizing of spheres after deposition. Nanodisks with diameters down to 200 nm were made.},
doi = {10.1063/1.4954349},
journal = {AIP Conference Proceedings},
number = 1,
volume = 1748,
place = {United States},
year = {Fri Jun 17 00:00:00 EDT 2016},
month = {Fri Jun 17 00:00:00 EDT 2016}
}