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Title: ZrO{sub 2}-ZnO composite thin films for humidity sensing

Abstract

ZrO{sub 2}-ZnO composite thin films were grown by reactive DC magnetron sputtering. X-ray diffraction studies reveal the composite nature of the films with separate ZnO and ZrO{sub 2} phase. Scanning electron microscopy studies confirm the nanocrystalline structure of the films. The films were studied for their impedometric relative humidity (RH) sensing characteristics. The complex impedance plot was fitted with a standard equivalent circuit consisting of an inter-granular resistance and a capacitance in parallel. The DC resistance was found to be decreasing with increase in RH.

Authors:
; ;  [1]; ;  [2]
  1. MEMS and Sensor Division, School of Electronics Engineering, VIT University, Vellore, 632014 (India)
  2. Materials Physics Division, School of Advanced Science, VIT University, Vellore, 632014 (India)
Publication Date:
OSTI Identifier:
22608684
Resource Type:
Journal Article
Journal Name:
AIP Conference Proceedings
Additional Journal Information:
Journal Volume: 1731; Journal Issue: 1; Conference: DAE solid state physics symposium 2015, Uttar Pradesh (India), 21-25 Dec 2015; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CAPACITANCE; CRYSTALS; EQUIVALENT CIRCUITS; HUMIDITY; IMPEDANCE; MAGNETRONS; NANOSTRUCTURES; SCANNING ELECTRON MICROSCOPY; SPUTTERING; THIN FILMS; X-RAY DIFFRACTION; ZINC OXIDES; ZIRCONIUM OXIDES

Citation Formats

Velumani, M., E-mail: velumanimohan@gmail.com, Sivacoumar, R., Alex, Z. C., Meher, S. R., and Balakrishnan, L. ZrO{sub 2}-ZnO composite thin films for humidity sensing. United States: N. p., 2016. Web. doi:10.1063/1.4947910.
Velumani, M., E-mail: velumanimohan@gmail.com, Sivacoumar, R., Alex, Z. C., Meher, S. R., & Balakrishnan, L. ZrO{sub 2}-ZnO composite thin films for humidity sensing. United States. doi:10.1063/1.4947910.
Velumani, M., E-mail: velumanimohan@gmail.com, Sivacoumar, R., Alex, Z. C., Meher, S. R., and Balakrishnan, L. Mon . "ZrO{sub 2}-ZnO composite thin films for humidity sensing". United States. doi:10.1063/1.4947910.
@article{osti_22608684,
title = {ZrO{sub 2}-ZnO composite thin films for humidity sensing},
author = {Velumani, M., E-mail: velumanimohan@gmail.com and Sivacoumar, R. and Alex, Z. C. and Meher, S. R. and Balakrishnan, L.},
abstractNote = {ZrO{sub 2}-ZnO composite thin films were grown by reactive DC magnetron sputtering. X-ray diffraction studies reveal the composite nature of the films with separate ZnO and ZrO{sub 2} phase. Scanning electron microscopy studies confirm the nanocrystalline structure of the films. The films were studied for their impedometric relative humidity (RH) sensing characteristics. The complex impedance plot was fitted with a standard equivalent circuit consisting of an inter-granular resistance and a capacitance in parallel. The DC resistance was found to be decreasing with increase in RH.},
doi = {10.1063/1.4947910},
journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 1731,
place = {United States},
year = {2016},
month = {5}
}