Structural, morphological and optical properties of CeO{sub 2} thin films deposited by RF sputtering
Abstract
Cerium oxide (CeO{sub 2}) thin films were deposited on glass substrates by sputtering at various substrate temperatures. CeO{sub 2} films were characterized by X-ray diffraction, FESEM, PL and Raman analyses. X-ray diffraction patterns of films reveal fcc cubic structure with preferential orientation along (2 2 0) crystallographic plane. SEM images show that the particles are uniformly distributed on the film surface. The films were found to be well adheared to the substrates and pin holes are not observed on the surface of the films. PL spectra exhibits a strong near band-gap-edge emission and a broad blue, green luminescence, which can be assigned to the presence of Ce and O vacancies, amorphous phases, deep level impurities and structural defects. The relative intensity between the different peaks of the bands related to defects or impurities was studied as a tool for quality control of the films. Moreover, vibrational measurements through Raman analysis were carried out and the results are discussed.
- Authors:
-
- Department of Electrical and Computer Engineering, Ajou University, Suwon 443-749 (Korea, Republic of)
- Publication Date:
- OSTI Identifier:
- 22608682
- Resource Type:
- Journal Article
- Journal Name:
- AIP Conference Proceedings
- Additional Journal Information:
- Journal Volume: 1731; Journal Issue: 1; Conference: DAE solid state physics symposium 2015, Uttar Pradesh (India), 21-25 Dec 2015; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; AMORPHOUS STATE; CERIUM OXIDES; CRYSTAL STRUCTURE; CRYSTALLOGRAPHY; DEFECTS; FCC LATTICES; GLASS; IMPURITIES; LUMINESCENCE; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; RAMAN EFFECT; SCANNING ELECTRON MICROSCOPY; SPECTRA; SUBSTRATES; SURFACES; THIN FILMS; VACANCIES; X-RAY DIFFRACTION
Citation Formats
Murugan, R., Vijayaprasath, G., Sakthivel, P., Ravi, G., E-mail: raviganesa@rediffmail.com, E-mail: gravicrc@gmail.com, and Mahalingam, T. Structural, morphological and optical properties of CeO{sub 2} thin films deposited by RF sputtering. United States: N. p., 2016.
Web. doi:10.1063/1.4947907.
Murugan, R., Vijayaprasath, G., Sakthivel, P., Ravi, G., E-mail: raviganesa@rediffmail.com, E-mail: gravicrc@gmail.com, & Mahalingam, T. Structural, morphological and optical properties of CeO{sub 2} thin films deposited by RF sputtering. United States. https://doi.org/10.1063/1.4947907
Murugan, R., Vijayaprasath, G., Sakthivel, P., Ravi, G., E-mail: raviganesa@rediffmail.com, E-mail: gravicrc@gmail.com, and Mahalingam, T. 2016.
"Structural, morphological and optical properties of CeO{sub 2} thin films deposited by RF sputtering". United States. https://doi.org/10.1063/1.4947907.
@article{osti_22608682,
title = {Structural, morphological and optical properties of CeO{sub 2} thin films deposited by RF sputtering},
author = {Murugan, R. and Vijayaprasath, G. and Sakthivel, P. and Ravi, G., E-mail: raviganesa@rediffmail.com, E-mail: gravicrc@gmail.com and Mahalingam, T.},
abstractNote = {Cerium oxide (CeO{sub 2}) thin films were deposited on glass substrates by sputtering at various substrate temperatures. CeO{sub 2} films were characterized by X-ray diffraction, FESEM, PL and Raman analyses. X-ray diffraction patterns of films reveal fcc cubic structure with preferential orientation along (2 2 0) crystallographic plane. SEM images show that the particles are uniformly distributed on the film surface. The films were found to be well adheared to the substrates and pin holes are not observed on the surface of the films. PL spectra exhibits a strong near band-gap-edge emission and a broad blue, green luminescence, which can be assigned to the presence of Ce and O vacancies, amorphous phases, deep level impurities and structural defects. The relative intensity between the different peaks of the bands related to defects or impurities was studied as a tool for quality control of the films. Moreover, vibrational measurements through Raman analysis were carried out and the results are discussed.},
doi = {10.1063/1.4947907},
url = {https://www.osti.gov/biblio/22608682},
journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 1731,
place = {United States},
year = {Mon May 23 00:00:00 EDT 2016},
month = {Mon May 23 00:00:00 EDT 2016}
}