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Title: Effect of annealing temperature on structural, morphological and electrical properties of nanoparticles TiO{sub 2} thin films by sol-gel method

Abstract

In this paper, the sol-gel method is used to prepare nanoparticles titanium dioxide (TiO{sub 2}) thin films at different annealing temperature. The prepared sol was deposited on the p-SiO{sub 2} substrates by spin coating technique under room temperature. The nanoparticles TiO{sub 2} solution was synthesized using Ti{OCH(CH_3)_2}{sub 4} as a precursor with an methanol solution at a molar ratio 1:10. The prepared TiO{sub 2} sols will further validate through structural, morphological and electrical properties. From the X-ray diffraction (XRD) analysis, as-deposited films was found to be amorphous in nature and tend to transform into tetragonal anatase and rutile phase as the films annealed at 573 and 773 K, respectively. The diversification of the surface roughness was characterized by atomic force microscopy (AFM) indicated the roughness and thickness very dependent on the annealing temperature. The two-point probe electrical resistance and conductance of nanoparticles TiO{sub 2} thin films were determined by the DC current-voltage (IV) analysis. From the I-V measurement, the electrical conductance increased as the films annealed at higher temperature.

Authors:
; ; ; ; ; ; ; ;  [1]
  1. Institute of Nano Electronic Engineering, Univerisiti Malaysia Perlis, 01000 Kangar, Perlis (Malaysia)
Publication Date:
OSTI Identifier:
22608624
Resource Type:
Journal Article
Journal Name:
AIP Conference Proceedings
Additional Journal Information:
Journal Volume: 1733; Journal Issue: 1; Conference: IC-NET 2015: International conference on nano-electronic technology devices and materials 2015, Selangor (Malaysia), 27 Feb - 2 Mar 2015; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; ANNEALING; ATOMIC FORCE MICROSCOPY; CURRENTS; DIVERSIFICATION; ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; NANOPARTICLES; PRECURSOR; ROUGHNESS; SILICON OXIDES; SOL-GEL PROCESS; SPIN; SPIN-ON COATING; SUBSTRATES; SURFACES; TEMPERATURE RANGE 0273-0400 K; THICKNESS; THIN FILMS; TITANIUM OXIDES; X-RAY DIFFRACTION

Citation Formats

Muaz, A. K. M., Hashim, U., E-mail: uda@unimap.edu.my, Arshad, M. K. Md., Ruslinda, A. R., Ayub, R. M., Gopinath, Subash C. B., Voon, C. H., Liu, Wei-Wen, and Foo, K. L. Effect of annealing temperature on structural, morphological and electrical properties of nanoparticles TiO{sub 2} thin films by sol-gel method. United States: N. p., 2016. Web. doi:10.1063/1.4948905.
Muaz, A. K. M., Hashim, U., E-mail: uda@unimap.edu.my, Arshad, M. K. Md., Ruslinda, A. R., Ayub, R. M., Gopinath, Subash C. B., Voon, C. H., Liu, Wei-Wen, & Foo, K. L. Effect of annealing temperature on structural, morphological and electrical properties of nanoparticles TiO{sub 2} thin films by sol-gel method. United States. doi:10.1063/1.4948905.
Muaz, A. K. M., Hashim, U., E-mail: uda@unimap.edu.my, Arshad, M. K. Md., Ruslinda, A. R., Ayub, R. M., Gopinath, Subash C. B., Voon, C. H., Liu, Wei-Wen, and Foo, K. L. Wed . "Effect of annealing temperature on structural, morphological and electrical properties of nanoparticles TiO{sub 2} thin films by sol-gel method". United States. doi:10.1063/1.4948905.
@article{osti_22608624,
title = {Effect of annealing temperature on structural, morphological and electrical properties of nanoparticles TiO{sub 2} thin films by sol-gel method},
author = {Muaz, A. K. M. and Hashim, U., E-mail: uda@unimap.edu.my and Arshad, M. K. Md. and Ruslinda, A. R. and Ayub, R. M. and Gopinath, Subash C. B. and Voon, C. H. and Liu, Wei-Wen and Foo, K. L.},
abstractNote = {In this paper, the sol-gel method is used to prepare nanoparticles titanium dioxide (TiO{sub 2}) thin films at different annealing temperature. The prepared sol was deposited on the p-SiO{sub 2} substrates by spin coating technique under room temperature. The nanoparticles TiO{sub 2} solution was synthesized using Ti{OCH(CH_3)_2}{sub 4} as a precursor with an methanol solution at a molar ratio 1:10. The prepared TiO{sub 2} sols will further validate through structural, morphological and electrical properties. From the X-ray diffraction (XRD) analysis, as-deposited films was found to be amorphous in nature and tend to transform into tetragonal anatase and rutile phase as the films annealed at 573 and 773 K, respectively. The diversification of the surface roughness was characterized by atomic force microscopy (AFM) indicated the roughness and thickness very dependent on the annealing temperature. The two-point probe electrical resistance and conductance of nanoparticles TiO{sub 2} thin films were determined by the DC current-voltage (IV) analysis. From the I-V measurement, the electrical conductance increased as the films annealed at higher temperature.},
doi = {10.1063/1.4948905},
journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 1733,
place = {United States},
year = {2016},
month = {7}
}