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Title: Study of nanoparticles TiO{sub 2} thin films on p-type silicon substrate using different alcoholic solvents

Abstract

In this paper, sol-gel method spin coating technique is adopted to prepare nanoparticles titanium dioxide (TiO{sub 2}) thin films. The prepared TiO{sub 2} sol was synthesized using titanium butoxide act as a precursor and subjected to deposited on the p-type silicon oxide (p-SiO{sub 2}) and glass slide substrates under room temperature. The effect of different alcoholic solvents of methanol and ethanol on the structural, morphological, optical and electrical properties were systematically investigated. The coated TiO{sub 2} thin films were annealed in furnace at 773 K for 1 h. The structural properties of the TiO{sub 2} films were examined with X-ray Diffraction (XRD). From the XRD analysis, both solvents showing good crystallinity with anatase phase were the predominant structure. Atomic Force Microscopy (AFM) was employed to study the morphological of the thin films. The optical properties were investigated by Ultraviolet-visible (UV-Vis) spectroscopy were found that ethanol as a solvent give a higher optical transmittance if compare to the methanol solvent. The electrical properties of the nanoparticles TiO{sub 2} thin films were measured using two-point-probe technique.

Authors:
; ; ; ; ; ;  [1]; ;  [1];  [2]
  1. Institute of Nano Electronic Engineering, Universiti Malaysia Perlis, 01000 Kangar, Perlis (Malaysia)
  2. (Malaysia)
Publication Date:
OSTI Identifier:
22608623
Resource Type:
Journal Article
Journal Name:
AIP Conference Proceedings
Additional Journal Information:
Journal Volume: 1733; Journal Issue: 1; Conference: IC-NET 2015: International conference on nano-electronic technology devices and materials 2015, Selangor (Malaysia), 27 Feb - 2 Mar 2015; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; ANNEALING; ATOMIC FORCE MICROSCOPY; COMPARATIVE EVALUATIONS; ELECTRICAL PROPERTIES; ETHANOL; GLASS; METHANOL; NANOPARTICLES; OPTICAL PROPERTIES; SILICON; SILICON OXIDES; SOL-GEL PROCESS; SPECTROSCOPY; SPIN-ON COATING; SUBSTRATES; TEMPERATURE RANGE 0273-0400 K; THIN FILMS; TITANIUM OXIDES; ULTRAVIOLET RADIATION; X-RAY DIFFRACTION

Citation Formats

Muaz, A. K. M., Ruslinda, A. R., Ayub, R. M., Gopinath, Subash C. B., Voon, C. H., Liu, Wei-Wen, Foo, K. L., Hashim, U., E-mail: uda@unimap.edu.my, Arshad, M. K. Md., and School of Microelectronic Engineering, Universiti Malaysia Perlis, 01000 Kangar, Perlis. Study of nanoparticles TiO{sub 2} thin films on p-type silicon substrate using different alcoholic solvents. United States: N. p., 2016. Web. doi:10.1063/1.4948904.
Muaz, A. K. M., Ruslinda, A. R., Ayub, R. M., Gopinath, Subash C. B., Voon, C. H., Liu, Wei-Wen, Foo, K. L., Hashim, U., E-mail: uda@unimap.edu.my, Arshad, M. K. Md., & School of Microelectronic Engineering, Universiti Malaysia Perlis, 01000 Kangar, Perlis. Study of nanoparticles TiO{sub 2} thin films on p-type silicon substrate using different alcoholic solvents. United States. doi:10.1063/1.4948904.
Muaz, A. K. M., Ruslinda, A. R., Ayub, R. M., Gopinath, Subash C. B., Voon, C. H., Liu, Wei-Wen, Foo, K. L., Hashim, U., E-mail: uda@unimap.edu.my, Arshad, M. K. Md., and School of Microelectronic Engineering, Universiti Malaysia Perlis, 01000 Kangar, Perlis. Wed . "Study of nanoparticles TiO{sub 2} thin films on p-type silicon substrate using different alcoholic solvents". United States. doi:10.1063/1.4948904.
@article{osti_22608623,
title = {Study of nanoparticles TiO{sub 2} thin films on p-type silicon substrate using different alcoholic solvents},
author = {Muaz, A. K. M. and Ruslinda, A. R. and Ayub, R. M. and Gopinath, Subash C. B. and Voon, C. H. and Liu, Wei-Wen and Foo, K. L. and Hashim, U., E-mail: uda@unimap.edu.my and Arshad, M. K. Md. and School of Microelectronic Engineering, Universiti Malaysia Perlis, 01000 Kangar, Perlis},
abstractNote = {In this paper, sol-gel method spin coating technique is adopted to prepare nanoparticles titanium dioxide (TiO{sub 2}) thin films. The prepared TiO{sub 2} sol was synthesized using titanium butoxide act as a precursor and subjected to deposited on the p-type silicon oxide (p-SiO{sub 2}) and glass slide substrates under room temperature. The effect of different alcoholic solvents of methanol and ethanol on the structural, morphological, optical and electrical properties were systematically investigated. The coated TiO{sub 2} thin films were annealed in furnace at 773 K for 1 h. The structural properties of the TiO{sub 2} films were examined with X-ray Diffraction (XRD). From the XRD analysis, both solvents showing good crystallinity with anatase phase were the predominant structure. Atomic Force Microscopy (AFM) was employed to study the morphological of the thin films. The optical properties were investigated by Ultraviolet-visible (UV-Vis) spectroscopy were found that ethanol as a solvent give a higher optical transmittance if compare to the methanol solvent. The electrical properties of the nanoparticles TiO{sub 2} thin films were measured using two-point-probe technique.},
doi = {10.1063/1.4948904},
journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 1733,
place = {United States},
year = {2016},
month = {7}
}