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Title: X-ray microfocusing with off-axis ellipsoidal mirror

Abstract

High-precision ellipsoidal mirrors for two-dimensionally focusing X-rays to nanometer sizes have not been realized because of technical problems in their fabrication processes. The objective of the present study is to develop fabrication techniques for ellipsoidal focusing mirrors in the hard-X-ray region. We design an off-axis ellipsoidal mirror for use under total reflection conditions up to the X-ray energy of 8 keV. We fabricate an ellipsoidal mirror with a surface roughness of 0.3 nm RMS (root-mean-square) and a surface figure error height of 3.0 nm RMS by utilizing a surface profiler and surface finishing method developed by us. The focusing properties of the mirror are evaluated at the BL29XUL beamline in SPring-8. A focusing beam size of 270 nm × 360 nm FWHM (full width at half maximum) at an X-ray energy of 7 keV is observed with the use of the knife-edge scanning method. We expect to apply the developed fabrication techniques to construct ellipsoidal nanofocusing mirrors.

Authors:
;  [1]; ;  [2]; ;  [3];  [1]
  1. Japan Synchrotron Radiation Research Institute/SPring-8, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198 (Japan)
  2. Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)
  3. RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148 (Japan)
Publication Date:
OSTI Identifier:
22608392
Resource Type:
Journal Article
Journal Name:
AIP Conference Proceedings
Additional Journal Information:
Journal Volume: 1741; Journal Issue: 1; Conference: SRI2015: 12. international conference on synchrotron radiation instrumentation, New York, NY (United States), 6-10 Jul 2015; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ACCURACY; BEAMS; DESIGN; ERRORS; FABRICATION; FOCUSING; HARD X RADIATION; KEV RANGE 01-10; MIRRORS; REFLECTION; SPRING-8 STORAGE RING; SURFACES; TWO-DIMENSIONAL CALCULATIONS

Citation Formats

Yumoto, Hirokatsu, Koyama, Takahisa, Matsuyama, Satoshi, Yamauchi, Kazuto, Kohmura, Yoshiki, Ishikawa, Tetsuya, Ohashi, Haruhiko, and RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148. X-ray microfocusing with off-axis ellipsoidal mirror. United States: N. p., 2016. Web. doi:10.1063/1.4952879.
Yumoto, Hirokatsu, Koyama, Takahisa, Matsuyama, Satoshi, Yamauchi, Kazuto, Kohmura, Yoshiki, Ishikawa, Tetsuya, Ohashi, Haruhiko, & RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148. X-ray microfocusing with off-axis ellipsoidal mirror. United States. https://doi.org/10.1063/1.4952879
Yumoto, Hirokatsu, Koyama, Takahisa, Matsuyama, Satoshi, Yamauchi, Kazuto, Kohmura, Yoshiki, Ishikawa, Tetsuya, Ohashi, Haruhiko, and RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148. Wed . "X-ray microfocusing with off-axis ellipsoidal mirror". United States. https://doi.org/10.1063/1.4952879.
@article{osti_22608392,
title = {X-ray microfocusing with off-axis ellipsoidal mirror},
author = {Yumoto, Hirokatsu and Koyama, Takahisa and Matsuyama, Satoshi and Yamauchi, Kazuto and Kohmura, Yoshiki and Ishikawa, Tetsuya and Ohashi, Haruhiko and RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148},
abstractNote = {High-precision ellipsoidal mirrors for two-dimensionally focusing X-rays to nanometer sizes have not been realized because of technical problems in their fabrication processes. The objective of the present study is to develop fabrication techniques for ellipsoidal focusing mirrors in the hard-X-ray region. We design an off-axis ellipsoidal mirror for use under total reflection conditions up to the X-ray energy of 8 keV. We fabricate an ellipsoidal mirror with a surface roughness of 0.3 nm RMS (root-mean-square) and a surface figure error height of 3.0 nm RMS by utilizing a surface profiler and surface finishing method developed by us. The focusing properties of the mirror are evaluated at the BL29XUL beamline in SPring-8. A focusing beam size of 270 nm × 360 nm FWHM (full width at half maximum) at an X-ray energy of 7 keV is observed with the use of the knife-edge scanning method. We expect to apply the developed fabrication techniques to construct ellipsoidal nanofocusing mirrors.},
doi = {10.1063/1.4952879},
url = {https://www.osti.gov/biblio/22608392}, journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 1741,
place = {United States},
year = {2016},
month = {7}
}