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Title: High resolution, monochromatic x-ray topography capability at CHESS

Abstract

CHESS has a monochromatic x-ray topography capability serving continually expanding user interest. The setup consists of a beam expanding monochromator, 6-circle diffactometer, and CHESS designed CMOS camera with real time sample-alignment capability. This provides rocking curve mapping with angle resolution as small as 2 µradians, spatial resolution to 3 microns, and field of view up to 7mm. Thus far the capability has been applied for: improving CVD-diamond growth, evaluating perfection of ultra-thin diamond membranes, correlating performance of diamond-based electronics with crystal defect structure, and defect analysis of single crystal silicon carbide. This paper describes our topography system, explains its capabilities, and presents experimental results from several applications.

Authors:
; ;  [1];  [2]; ;  [3];  [4];  [5]
  1. CHESS, Cornell University, Ithaca, NY (United States)
  2. Department of Physics, University of Connecticut, Storrs, CT (United States)
  3. IIa Technologies (Singapore)
  4. St. Mary’s College of Maryland, St. Mary’s City, MD (United States)
  5. CLASSE, Cornell University, Ithaca, NY (United States)
Publication Date:
OSTI Identifier:
22608362
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1741; Journal Issue: 1; Conference: SRI2015: 12. international conference on synchrotron radiation instrumentation, New York, NY (United States), 6-10 Jul 2015; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ALIGNMENT; BEAMS; CHEMICAL VAPOR DEPOSITION; CRYSTAL DEFECTS; DEFECTS; DIAMONDS; MEMBRANES; MONOCHROMATIC RADIATION; MONOCHROMATORS; MONOCRYSTALS; NEUTRON DIFFRACTION; PERFORMANCE; SILICON CARBIDES; SPATIAL RESOLUTION; X RADIATION

Citation Formats

Finkelstein, K. D., E-mail: kdf1@cornell.edu, Pauling, A., Brown, Z., Jones, R., Tarun, A., Misra, D. S., Jupitz, S., and Sagan, D. C. High resolution, monochromatic x-ray topography capability at CHESS. United States: N. p., 2016. Web. doi:10.1063/1.4952849.
Finkelstein, K. D., E-mail: kdf1@cornell.edu, Pauling, A., Brown, Z., Jones, R., Tarun, A., Misra, D. S., Jupitz, S., & Sagan, D. C. High resolution, monochromatic x-ray topography capability at CHESS. United States. doi:10.1063/1.4952849.
Finkelstein, K. D., E-mail: kdf1@cornell.edu, Pauling, A., Brown, Z., Jones, R., Tarun, A., Misra, D. S., Jupitz, S., and Sagan, D. C. Wed . "High resolution, monochromatic x-ray topography capability at CHESS". United States. doi:10.1063/1.4952849.
@article{osti_22608362,
title = {High resolution, monochromatic x-ray topography capability at CHESS},
author = {Finkelstein, K. D., E-mail: kdf1@cornell.edu and Pauling, A. and Brown, Z. and Jones, R. and Tarun, A. and Misra, D. S. and Jupitz, S. and Sagan, D. C.},
abstractNote = {CHESS has a monochromatic x-ray topography capability serving continually expanding user interest. The setup consists of a beam expanding monochromator, 6-circle diffactometer, and CHESS designed CMOS camera with real time sample-alignment capability. This provides rocking curve mapping with angle resolution as small as 2 µradians, spatial resolution to 3 microns, and field of view up to 7mm. Thus far the capability has been applied for: improving CVD-diamond growth, evaluating perfection of ultra-thin diamond membranes, correlating performance of diamond-based electronics with crystal defect structure, and defect analysis of single crystal silicon carbide. This paper describes our topography system, explains its capabilities, and presents experimental results from several applications.},
doi = {10.1063/1.4952849},
journal = {AIP Conference Proceedings},
number = 1,
volume = 1741,
place = {United States},
year = {Wed Jul 27 00:00:00 EDT 2016},
month = {Wed Jul 27 00:00:00 EDT 2016}
}