High resolution, monochromatic x-ray topography capability at CHESS
- CHESS, Cornell University, Ithaca, NY (United States)
- Department of Physics, University of Connecticut, Storrs, CT (United States)
- IIa Technologies (Singapore)
- St. Mary’s College of Maryland, St. Mary’s City, MD (United States)
- CLASSE, Cornell University, Ithaca, NY (United States)
CHESS has a monochromatic x-ray topography capability serving continually expanding user interest. The setup consists of a beam expanding monochromator, 6-circle diffactometer, and CHESS designed CMOS camera with real time sample-alignment capability. This provides rocking curve mapping with angle resolution as small as 2 µradians, spatial resolution to 3 microns, and field of view up to 7mm. Thus far the capability has been applied for: improving CVD-diamond growth, evaluating perfection of ultra-thin diamond membranes, correlating performance of diamond-based electronics with crystal defect structure, and defect analysis of single crystal silicon carbide. This paper describes our topography system, explains its capabilities, and presents experimental results from several applications.
- OSTI ID:
- 22608362
- Journal Information:
- AIP Conference Proceedings, Vol. 1741, Issue 1; Conference: SRI2015: 12. international conference on synchrotron radiation instrumentation, New York, NY (United States), 6-10 Jul 2015; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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