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Title: Hard x-ray photoelectron spectroscopy equipment developed at beamline BL46XU of SPring-8 for industrial researches

Abstract

Hard X-ray photoelectron spectroscopy (HAXPES) is a powerful tool for investigating the chemical and electronic states of bulk and buried interface in a non-destructive manner due to the large probing depth of this technique. At BL46XU of SPring-8, there are two HAXPES systems equipped with different electron spectrometers, which can be utilized appropriately according to the purpose in various industrial researches. In this article, these systems are outlined, and two typical examples of HAXPES studies performed by them are presented, which focus on the silicidation at Ni/SiC interface and the energy distribution of interface states at SiO{sub 2}/a-InGaZnO.

Authors:
; ;  [1];  [1];  [2]
  1. Japan Synchrotron Radiation Research Institute, 1-1-1 Kouto, Sayo, Hyogo 679-5198 (Japan)
  2. (Japan)
Publication Date:
OSTI Identifier:
22608356
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1741; Journal Issue: 1; Conference: SRI2015: 12. international conference on synchrotron radiation instrumentation, New York, NY (United States), 6-10 Jul 2015; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ELECTRON SPECTROMETERS; ENERGY SPECTRA; HARD X RADIATION; INTERFACES; NICKEL; SILICON CARBIDES; SILICON OXIDES; SPRING-8 STORAGE RING; X-RAY PHOTOELECTRON SPECTROSCOPY

Citation Formats

Yasuno, Satoshi, E-mail: yasuno@spring8.or.jp, Koganezawa, Tomoyuki, Watanabe, Takeshi, Oji, Hiroshi, and SPring-8 Service Co., Ltd., 1-20-5 Kouto, Shingu, Tatsuno, Hyogo 679-5165. Hard x-ray photoelectron spectroscopy equipment developed at beamline BL46XU of SPring-8 for industrial researches. United States: N. p., 2016. Web. doi:10.1063/1.4952843.
Yasuno, Satoshi, E-mail: yasuno@spring8.or.jp, Koganezawa, Tomoyuki, Watanabe, Takeshi, Oji, Hiroshi, & SPring-8 Service Co., Ltd., 1-20-5 Kouto, Shingu, Tatsuno, Hyogo 679-5165. Hard x-ray photoelectron spectroscopy equipment developed at beamline BL46XU of SPring-8 for industrial researches. United States. doi:10.1063/1.4952843.
Yasuno, Satoshi, E-mail: yasuno@spring8.or.jp, Koganezawa, Tomoyuki, Watanabe, Takeshi, Oji, Hiroshi, and SPring-8 Service Co., Ltd., 1-20-5 Kouto, Shingu, Tatsuno, Hyogo 679-5165. Wed . "Hard x-ray photoelectron spectroscopy equipment developed at beamline BL46XU of SPring-8 for industrial researches". United States. doi:10.1063/1.4952843.
@article{osti_22608356,
title = {Hard x-ray photoelectron spectroscopy equipment developed at beamline BL46XU of SPring-8 for industrial researches},
author = {Yasuno, Satoshi, E-mail: yasuno@spring8.or.jp and Koganezawa, Tomoyuki and Watanabe, Takeshi and Oji, Hiroshi and SPring-8 Service Co., Ltd., 1-20-5 Kouto, Shingu, Tatsuno, Hyogo 679-5165},
abstractNote = {Hard X-ray photoelectron spectroscopy (HAXPES) is a powerful tool for investigating the chemical and electronic states of bulk and buried interface in a non-destructive manner due to the large probing depth of this technique. At BL46XU of SPring-8, there are two HAXPES systems equipped with different electron spectrometers, which can be utilized appropriately according to the purpose in various industrial researches. In this article, these systems are outlined, and two typical examples of HAXPES studies performed by them are presented, which focus on the silicidation at Ni/SiC interface and the energy distribution of interface states at SiO{sub 2}/a-InGaZnO.},
doi = {10.1063/1.4952843},
journal = {AIP Conference Proceedings},
number = 1,
volume = 1741,
place = {United States},
year = {Wed Jul 27 00:00:00 EDT 2016},
month = {Wed Jul 27 00:00:00 EDT 2016}
}