skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Note: Experimental observation of nano-channel pattern in light sheet laser interference nanolithography system

Abstract

We experimentally observed nano-channel-like pattern in a light-sheet based interference nanolithography system. The optical system created nano-channel-like patterned illumination. Coherent counter-propagating light sheets are made to interfere at and near geometrical focus along the propagation z-axis. This results in the formation of nano-channel-like pattern (of size ≈ 300 nm and inter-channel periodicity of ≈337.5 nm) inside the sample due to constructive and destructive interference. In addition, the technique has the ability to generate large area patterning using larger light-sheets. Exciting applications are in the broad field of nanotechnology (nano-electronics and nano-fluidics).

Authors:
;  [1]
  1. Nanobioimaging Laboratory, Department of Instrumentation and Applied Physics, Indian Institute of Science, Bangalore 560012 (India)
Publication Date:
OSTI Identifier:
22597997
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 87; Journal Issue: 6; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ILLUMINANCE; INTERFERENCE; LASERS; NANOTECHNOLOGY; OPTICAL SYSTEMS; PERIODICITY; SHEETS

Citation Formats

Mohan, Kavya, and Mondal, Partha Pratim, E-mail: partha@iap.iisc.ernet.in. Note: Experimental observation of nano-channel pattern in light sheet laser interference nanolithography system. United States: N. p., 2016. Web. doi:10.1063/1.4954198.
Mohan, Kavya, & Mondal, Partha Pratim, E-mail: partha@iap.iisc.ernet.in. Note: Experimental observation of nano-channel pattern in light sheet laser interference nanolithography system. United States. doi:10.1063/1.4954198.
Mohan, Kavya, and Mondal, Partha Pratim, E-mail: partha@iap.iisc.ernet.in. Wed . "Note: Experimental observation of nano-channel pattern in light sheet laser interference nanolithography system". United States. doi:10.1063/1.4954198.
@article{osti_22597997,
title = {Note: Experimental observation of nano-channel pattern in light sheet laser interference nanolithography system},
author = {Mohan, Kavya and Mondal, Partha Pratim, E-mail: partha@iap.iisc.ernet.in},
abstractNote = {We experimentally observed nano-channel-like pattern in a light-sheet based interference nanolithography system. The optical system created nano-channel-like patterned illumination. Coherent counter-propagating light sheets are made to interfere at and near geometrical focus along the propagation z-axis. This results in the formation of nano-channel-like pattern (of size ≈ 300 nm and inter-channel periodicity of ≈337.5 nm) inside the sample due to constructive and destructive interference. In addition, the technique has the ability to generate large area patterning using larger light-sheets. Exciting applications are in the broad field of nanotechnology (nano-electronics and nano-fluidics).},
doi = {10.1063/1.4954198},
journal = {Review of Scientific Instruments},
number = 6,
volume = 87,
place = {United States},
year = {Wed Jun 15 00:00:00 EDT 2016},
month = {Wed Jun 15 00:00:00 EDT 2016}
}
  • We propose a laser interference technique for the fabrication of 3D nano-structures. This is possible with the introduction of specialized spatial filter in a 2π cylindrical lens system (consists of two opposing cylindrical lens sharing a common geometrical focus). The spatial filter at the back-aperture of a cylindrical lens gives rise to multiple light-sheet patterns. Two such interfering counter-propagating light-sheet pattern result in periodic 3D nano-pillar structure. This technique overcomes the existing slow point-by-point scanning, and has the ability to pattern selectively over a large volume. The proposed technique allows large-scale fabrication of periodic structures. Computational study shows a field-of-viewmore » (patterning volume) of approximately 12.2 mm{sup 3} with the pillar-size of 80 nm and inter-pillar separation of 180 nm. Applications are in nano-waveguides, 3D nano-electronics, photonic crystals, and optical microscopy.« less
  • Abstract Layers of the metastable, amorphous HAlO are synthesized by chemical vapor deposition from the molecular compound tert-butoxyalane ([tBu-O-AlH2]2). At temperatures above 500 C, these layers transform to biphasic Al Al2O3 due to the elimination of di-hydrogen. The interaction of HAlO films with short laser pulses causes partial transformation of amorphous HAlO into nano-crystalline Al Al2O3. Using an interference pattern of two coherent high-power Nd:YAG laser beams produces local and periodic heating, inducing crystallization at equally distant lines in the HAlO layer. Depending on the laser fluence, different morphologies and different amounts of crystalline phases are obtained. In this study,more » the surface morphology and the distribution of crystalline phases of the structured samples are analyzed using SEM, FIB and TEM. The two-dimensional structures consist of periodic variations of morphology, chemical composition, and phase identity with a well-defined long-range order. When bio-functionalized, the structured samples may be used as carriers for structurally controlled cell-cultivation.« less
  • Interfering laser beams of a high-power pulsed laser provide the opportunity of applying a direct lateral interaction with the surface microstructure of metals in micro/nanoscale based on photo-thermal nature mechanisms. This "Laser interference metallurgy" allows the creation of periodic patterns of features with a well defined long-range order on metallic surfaces at the scale of typical microstructures (from the sub micrometer level up to micrometers). This technique is an approach to initiate metallurgical processes such as melting, recrystallization, recovery, and defect and phase formation in the lateral scale of the microstructure itself and with an additional long range order givenmore » by the interference periodicity. In this work, the laser interference theory is described and used to calculate multi-beam interference patterns. A method to calculate the numbers of laser beams as well as the geometrical arrangement of the beams to obtain a desired periodical pattern prior to experiments is presented. The formation of long-range-ordered intermetallic compounds as well as macroscopic and microscopic variations of mechanical properties on structured metallic thin films are presented as examples.« less