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Title: Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology

Abstract

A compact, fiber-coupled, six degree-of-freedom measurement system which enables fast, accurate calibration, and error mapping of precision linear stages is presented. The novel design has the advantages of simplicity, compactness, and relatively low cost. This proposed sensor can simultaneously measure displacement, two straightness errors, and changes in pitch, yaw, and roll using a single optical beam traveling between the measurement system and a small target. The optical configuration of the system and the working principle for all degrees-of-freedom are presented along with the influence and compensation of crosstalk motions in roll and straightness measurements. Several comparison experiments are conducted to investigate the feasibility and performance of the proposed system in each degree-of-freedom independently. Comparison experiments to a commercial interferometer demonstrate error standard deviations of 0.33 μm in straightness, 0.14 μrad in pitch, 0.44 μradin yaw, and 45.8 μrad in roll.

Authors:
;  [1];  [2];  [1];  [3]
  1. Department of Mechanical Engineering, University of Rochester, Rochester, New York 14627 (United States)
  2. InSituTec Incorporated, 7140 Weddington Road, Concord, North Carolina 28027 (United States)
  3. (United States)
Publication Date:
OSTI Identifier:
22597993
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 87; Journal Issue: 6; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ACCURACY; BEAMS; CALIBRATION; COMPARATIVE EVALUATIONS; CONFIGURATION; DEGREES OF FREEDOM; ERRORS; FIBERS; INTERFEROMETERS; SENSORS

Citation Formats

Yu, Xiangzhi, E-mail: xiangzhi.yu@rochester.edu, Gillmer, Steven R., Woody, Shane C., Ellis, Jonathan D., and The Institute of Optics, University of Rochester, Rochester, New York 14627. Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology. United States: N. p., 2016. Web. doi:10.1063/1.4953335.
Yu, Xiangzhi, E-mail: xiangzhi.yu@rochester.edu, Gillmer, Steven R., Woody, Shane C., Ellis, Jonathan D., & The Institute of Optics, University of Rochester, Rochester, New York 14627. Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology. United States. doi:10.1063/1.4953335.
Yu, Xiangzhi, E-mail: xiangzhi.yu@rochester.edu, Gillmer, Steven R., Woody, Shane C., Ellis, Jonathan D., and The Institute of Optics, University of Rochester, Rochester, New York 14627. 2016. "Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology". United States. doi:10.1063/1.4953335.
@article{osti_22597993,
title = {Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology},
author = {Yu, Xiangzhi, E-mail: xiangzhi.yu@rochester.edu and Gillmer, Steven R. and Woody, Shane C. and Ellis, Jonathan D. and The Institute of Optics, University of Rochester, Rochester, New York 14627},
abstractNote = {A compact, fiber-coupled, six degree-of-freedom measurement system which enables fast, accurate calibration, and error mapping of precision linear stages is presented. The novel design has the advantages of simplicity, compactness, and relatively low cost. This proposed sensor can simultaneously measure displacement, two straightness errors, and changes in pitch, yaw, and roll using a single optical beam traveling between the measurement system and a small target. The optical configuration of the system and the working principle for all degrees-of-freedom are presented along with the influence and compensation of crosstalk motions in roll and straightness measurements. Several comparison experiments are conducted to investigate the feasibility and performance of the proposed system in each degree-of-freedom independently. Comparison experiments to a commercial interferometer demonstrate error standard deviations of 0.33 μm in straightness, 0.14 μrad in pitch, 0.44 μradin yaw, and 45.8 μrad in roll.},
doi = {10.1063/1.4953335},
journal = {Review of Scientific Instruments},
number = 6,
volume = 87,
place = {United States},
year = 2016,
month = 6
}
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