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Title: Alternative uses of a megavolt tandem accelerator for few-keV studies with ion-source SIMS monitoring

Abstract

We increase the versatility of a tandem electrostatic accelerator by implementing simple modifications to the standard operation procedure. While keeping its ability to deliver MeV ion beams, we show that the experimental setup can (i) provide good quality ion beams in the few-keV energy range and (ii) be used to study ion-beam surface modification with simultaneous secondary ion mass spectrometry. This latter task is accomplished without using any chamber connected to the accelerator exit. We perform mass spectrometry of the few-keV anions produced in the ion source by measuring their neutral counterparts at the accelerator exit with energies up to 1.7 MeV. With an additional modification, a high-current few-keV regime is obtained, using the ion source as an irradiation chamber and the accelerator itself only as a mass spectrometer. As an example of application, we prepare a sample for the study of ion-beam assisted dewetting of a thin Au film on a Si substrate.

Authors:
 [1]; ; ;  [2]
  1. Departamento de Física, Universidade Federal de Viçosa, 36570-900 Viçosa, MG (Brazil)
  2. Instituto de Física, Universidade Federal do Rio de Janeiro, 21941-972 Rio de Janeiro, RJ (Brazil)
Publication Date:
OSTI Identifier:
22597969
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 87; Journal Issue: 6; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ANIONS; FILMS; ION BEAMS; ION MICROPROBE ANALYSIS; ION SOURCES; IRRADIATION; KEV RANGE 01-10; MASS SPECTROMETERS; MASS SPECTROSCOPY; MEV RANGE 01-10; MODIFICATIONS; MONITORING; SUBSTRATES; SURFACES; TANDEM ELECTROSTATIC ACCELERATORS

Citation Formats

Mello, S. L. A., E-mail: smello@ufv.br, Codeço, C. F. S., Magnani, B. F., and Sant’Anna, M. M. Alternative uses of a megavolt tandem accelerator for few-keV studies with ion-source SIMS monitoring. United States: N. p., 2016. Web. doi:10.1063/1.4953889.
Mello, S. L. A., E-mail: smello@ufv.br, Codeço, C. F. S., Magnani, B. F., & Sant’Anna, M. M. Alternative uses of a megavolt tandem accelerator for few-keV studies with ion-source SIMS monitoring. United States. doi:10.1063/1.4953889.
Mello, S. L. A., E-mail: smello@ufv.br, Codeço, C. F. S., Magnani, B. F., and Sant’Anna, M. M. Wed . "Alternative uses of a megavolt tandem accelerator for few-keV studies with ion-source SIMS monitoring". United States. doi:10.1063/1.4953889.
@article{osti_22597969,
title = {Alternative uses of a megavolt tandem accelerator for few-keV studies with ion-source SIMS monitoring},
author = {Mello, S. L. A., E-mail: smello@ufv.br and Codeço, C. F. S. and Magnani, B. F. and Sant’Anna, M. M.},
abstractNote = {We increase the versatility of a tandem electrostatic accelerator by implementing simple modifications to the standard operation procedure. While keeping its ability to deliver MeV ion beams, we show that the experimental setup can (i) provide good quality ion beams in the few-keV energy range and (ii) be used to study ion-beam surface modification with simultaneous secondary ion mass spectrometry. This latter task is accomplished without using any chamber connected to the accelerator exit. We perform mass spectrometry of the few-keV anions produced in the ion source by measuring their neutral counterparts at the accelerator exit with energies up to 1.7 MeV. With an additional modification, a high-current few-keV regime is obtained, using the ion source as an irradiation chamber and the accelerator itself only as a mass spectrometer. As an example of application, we prepare a sample for the study of ion-beam assisted dewetting of a thin Au film on a Si substrate.},
doi = {10.1063/1.4953889},
journal = {Review of Scientific Instruments},
number = 6,
volume = 87,
place = {United States},
year = {Wed Jun 15 00:00:00 EDT 2016},
month = {Wed Jun 15 00:00:00 EDT 2016}
}