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Title: Performance comparison of Rayleigh and STW modes on quartz crystal for strain sensor application

Abstract

In this study, we compare two kinds of strain sensors based on Rayleigh wave and surface transverse wave (STW) modes, respectively. First, we perform a strain-and-stress analysis using the finite element method, and we consider the contribution to a surface acoustic wave (SAW) velocity shift. Prior to fabrication, we use a coupling-of-modes model to simulate and optimize two-port SAW resonators for both modes. We use a network analyzer to measure and characterize the two devices. Further, we perform an experiment using a strain-testing system with a tapered cross-section cantilever beam. The experimental results show that the ratio of the frequency shift to the strain for the Rayleigh wave mode is −1.124 ppm/με in the parallel direction and 0.109 ppm/με in the perpendicular direction, while the corresponding values for the STW mode are 0.680 ppm/με and 0.189 ppm/με, respectively.

Authors:
; ; ;  [1]; ;  [2]
  1. Department of Electrical and Computer Engineering, Ajou University, Suwon 442-749 (Korea, Republic of)
  2. Nano-IT Fusion Program, Seoul National University of Science and Technology, Seoul 139-743 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22597862
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 120; Journal Issue: 2; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; BEAMS; COMPARATIVE EVALUATIONS; CROSS SECTIONS; CRYSTALS; FINITE ELEMENT METHOD; PERFORMANCE; QUARTZ; RAYLEIGH WAVES; RESONATORS; SENSORS; SOUND WAVES; STRAINS; STRESS ANALYSIS; SURFACES

Citation Formats

Fu, Chen, Lee, Ki Jung, Lee, Keekeun, Yang, Sang Sik, E-mail: ssyang@ajou.ac.kr, Eun, Kyongtae, and Choa, Sung-Hoon. Performance comparison of Rayleigh and STW modes on quartz crystal for strain sensor application. United States: N. p., 2016. Web. doi:10.1063/1.4955419.
Fu, Chen, Lee, Ki Jung, Lee, Keekeun, Yang, Sang Sik, E-mail: ssyang@ajou.ac.kr, Eun, Kyongtae, & Choa, Sung-Hoon. Performance comparison of Rayleigh and STW modes on quartz crystal for strain sensor application. United States. doi:10.1063/1.4955419.
Fu, Chen, Lee, Ki Jung, Lee, Keekeun, Yang, Sang Sik, E-mail: ssyang@ajou.ac.kr, Eun, Kyongtae, and Choa, Sung-Hoon. 2016. "Performance comparison of Rayleigh and STW modes on quartz crystal for strain sensor application". United States. doi:10.1063/1.4955419.
@article{osti_22597862,
title = {Performance comparison of Rayleigh and STW modes on quartz crystal for strain sensor application},
author = {Fu, Chen and Lee, Ki Jung and Lee, Keekeun and Yang, Sang Sik, E-mail: ssyang@ajou.ac.kr and Eun, Kyongtae and Choa, Sung-Hoon},
abstractNote = {In this study, we compare two kinds of strain sensors based on Rayleigh wave and surface transverse wave (STW) modes, respectively. First, we perform a strain-and-stress analysis using the finite element method, and we consider the contribution to a surface acoustic wave (SAW) velocity shift. Prior to fabrication, we use a coupling-of-modes model to simulate and optimize two-port SAW resonators for both modes. We use a network analyzer to measure and characterize the two devices. Further, we perform an experiment using a strain-testing system with a tapered cross-section cantilever beam. The experimental results show that the ratio of the frequency shift to the strain for the Rayleigh wave mode is −1.124 ppm/με in the parallel direction and 0.109 ppm/με in the perpendicular direction, while the corresponding values for the STW mode are 0.680 ppm/με and 0.189 ppm/με, respectively.},
doi = {10.1063/1.4955419},
journal = {Journal of Applied Physics},
number = 2,
volume = 120,
place = {United States},
year = 2016,
month = 7
}
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