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Title: Diffraction efficiency of plasmonic gratings fabricated by electron beam lithography using a silver halide film

Abstract

The silver nanoparticle surface relief gratings of ∼10 μm period are fabricated using electron beam lithography on the silver halide film substrate. Morphological characterization of the gratings shows that the period, the shape, and the relief depth in the gratings are mainly dependent on the number of lines per frame, the spot size, and the accelerating voltage of electron beam raster in the SEM. Optical absorption of the silver nanoparticle gratings provides a broad localized surface plasmon resonance peak in the visible region, whereas the intensity of the peaks depends on the number density of silver nanoparticles in the gratings. The maximum efficiency of ∼7.2% for first order diffraction is observed for the grating fabricated at 15 keV. The efficiency is peaking at 560 nm with ∼380 nm bandwidth. The measured profiles of the diffraction efficiency for the gratings are found in close agreement with the Raman-Nath diffraction theory. This technique provides a simple and efficient method for the fabrication of plasmonic nanoparticle grating structures with high diffraction efficiency having broad wavelength tuning.

Authors:
; ; ; ; ;  [1];  [2];  [3];  [1];  [2];  [1];  [2];  [1];  [2]
  1. Homi Bhabha National Institute, Mumbai, Maharashtra 400094 (India)
  2. (India)
  3. Solid State Lasers Division, Raja Ramanna Centre for Advanced Technology, Indore, Madhya Pradesh 452013 (India)
Publication Date:
OSTI Identifier:
22597771
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 120; Journal Issue: 4; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ABSORPTION; DEPTH; DIFFRACTION; EFFICIENCY; ELECTRON BEAMS; ELECTRONS; FABRICATION; FILMS; GRATINGS; KEV RANGE 10-100; NANOPARTICLES; PEAKS; PLASMONS; RAMAN EFFECT; SCANNING ELECTRON MICROSCOPY; SILVER; SILVER HALIDES; SUBSTRATES; SURFACES; WAVELENGTHS

Citation Formats

Sudheer,, E-mail: sudheer@rrcat.gov.in, E-mail: sudheer.rrcat@gmail.com, Tiwari, P., Srivastava, Himanshu, Rai, V. N., Srivastava, A. K., Naik, P. A., Indus Synchrotrons Utilization Division, Raja Ramanna Centre for Advanced Technology, Indore, Madhya Pradesh 452013, Porwal, S., Bhartiya, S., Laser Materials Development and Device Division, Raja Ramanna Centre for Advanced Technology, Indore, Madhya Pradesh 452013, Rao, B. T., Laser Materials Processing Division, Raja Ramanna Centre for Advanced Technology, Indore, Madhya Pradesh 452013, Sharma, T. K., and Solid State Lasers Division, Raja Ramanna Centre for Advanced Technology, Indore, Madhya Pradesh 452013. Diffraction efficiency of plasmonic gratings fabricated by electron beam lithography using a silver halide film. United States: N. p., 2016. Web. doi:10.1063/1.4956438.
Sudheer,, E-mail: sudheer@rrcat.gov.in, E-mail: sudheer.rrcat@gmail.com, Tiwari, P., Srivastava, Himanshu, Rai, V. N., Srivastava, A. K., Naik, P. A., Indus Synchrotrons Utilization Division, Raja Ramanna Centre for Advanced Technology, Indore, Madhya Pradesh 452013, Porwal, S., Bhartiya, S., Laser Materials Development and Device Division, Raja Ramanna Centre for Advanced Technology, Indore, Madhya Pradesh 452013, Rao, B. T., Laser Materials Processing Division, Raja Ramanna Centre for Advanced Technology, Indore, Madhya Pradesh 452013, Sharma, T. K., & Solid State Lasers Division, Raja Ramanna Centre for Advanced Technology, Indore, Madhya Pradesh 452013. Diffraction efficiency of plasmonic gratings fabricated by electron beam lithography using a silver halide film. United States. doi:10.1063/1.4956438.
Sudheer,, E-mail: sudheer@rrcat.gov.in, E-mail: sudheer.rrcat@gmail.com, Tiwari, P., Srivastava, Himanshu, Rai, V. N., Srivastava, A. K., Naik, P. A., Indus Synchrotrons Utilization Division, Raja Ramanna Centre for Advanced Technology, Indore, Madhya Pradesh 452013, Porwal, S., Bhartiya, S., Laser Materials Development and Device Division, Raja Ramanna Centre for Advanced Technology, Indore, Madhya Pradesh 452013, Rao, B. T., Laser Materials Processing Division, Raja Ramanna Centre for Advanced Technology, Indore, Madhya Pradesh 452013, Sharma, T. K., and Solid State Lasers Division, Raja Ramanna Centre for Advanced Technology, Indore, Madhya Pradesh 452013. Thu . "Diffraction efficiency of plasmonic gratings fabricated by electron beam lithography using a silver halide film". United States. doi:10.1063/1.4956438.
@article{osti_22597771,
title = {Diffraction efficiency of plasmonic gratings fabricated by electron beam lithography using a silver halide film},
author = {Sudheer,, E-mail: sudheer@rrcat.gov.in, E-mail: sudheer.rrcat@gmail.com and Tiwari, P. and Srivastava, Himanshu and Rai, V. N. and Srivastava, A. K. and Naik, P. A. and Indus Synchrotrons Utilization Division, Raja Ramanna Centre for Advanced Technology, Indore, Madhya Pradesh 452013 and Porwal, S. and Bhartiya, S. and Laser Materials Development and Device Division, Raja Ramanna Centre for Advanced Technology, Indore, Madhya Pradesh 452013 and Rao, B. T. and Laser Materials Processing Division, Raja Ramanna Centre for Advanced Technology, Indore, Madhya Pradesh 452013 and Sharma, T. K. and Solid State Lasers Division, Raja Ramanna Centre for Advanced Technology, Indore, Madhya Pradesh 452013},
abstractNote = {The silver nanoparticle surface relief gratings of ∼10 μm period are fabricated using electron beam lithography on the silver halide film substrate. Morphological characterization of the gratings shows that the period, the shape, and the relief depth in the gratings are mainly dependent on the number of lines per frame, the spot size, and the accelerating voltage of electron beam raster in the SEM. Optical absorption of the silver nanoparticle gratings provides a broad localized surface plasmon resonance peak in the visible region, whereas the intensity of the peaks depends on the number density of silver nanoparticles in the gratings. The maximum efficiency of ∼7.2% for first order diffraction is observed for the grating fabricated at 15 keV. The efficiency is peaking at 560 nm with ∼380 nm bandwidth. The measured profiles of the diffraction efficiency for the gratings are found in close agreement with the Raman-Nath diffraction theory. This technique provides a simple and efficient method for the fabrication of plasmonic nanoparticle grating structures with high diffraction efficiency having broad wavelength tuning.},
doi = {10.1063/1.4956438},
journal = {Journal of Applied Physics},
number = 4,
volume = 120,
place = {United States},
year = {Thu Jul 28 00:00:00 EDT 2016},
month = {Thu Jul 28 00:00:00 EDT 2016}
}