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Title: A fiber-coupled displacement measuring interferometer for determination of the posture of a reflective surface

Abstract

A fiber-coupled displacement measuring interferometer capable of determining of the posture of a reflective surface of a measuring mirror is proposed. The newly constructed instrument combines fiber-coupled displacement and angular measurement technologies. The proposed interferometer has advantages of both the fiber-coupled and the spatially beam-separated interferometer. A portable dual-position sensitive detector (PSD)-based unit within this proposed interferometer measures the parallelism of the two source beams to guide the fiber-coupling adjustment. The portable dual PSD-based unit measures not only the pitch and yaw of the retro-reflector but also measures the posture of the reflective surface. The experimental results of displacement calibration show that the deviations between the proposed interferometer and a reference one, Agilent 5530, at two different common beam directions are both less than ±35 nm, thus verifying the effectiveness of the beam parallelism measurement. The experimental results of angular calibration show that deviations of pitch and yaw with the auto-collimator (as a reference) are less than ±2 arc sec, thus proving the proposed interferometer’s effectiveness for determination of the posture of a reflective surface.

Authors:
; ; ;  [1]
  1. Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080 (China)
Publication Date:
OSTI Identifier:
22597657
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 87; Journal Issue: 8; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; BEAMS; CALIBRATION; COLLIMATORS; FIBERS; INTERFEROMETERS; MIRRORS; PITCHES; POSITION SENSITIVE DETECTORS; SURFACES

Citation Formats

Mao, Shuai, Hu, Peng-Cheng, E-mail: hupc@hit.edu.cn, Ding, Xue-Mei, E-mail: X.M.Ding@outlook.com, and Tan, Jiu-Bin. A fiber-coupled displacement measuring interferometer for determination of the posture of a reflective surface. United States: N. p., 2016. Web. doi:10.1063/1.4960661.
Mao, Shuai, Hu, Peng-Cheng, E-mail: hupc@hit.edu.cn, Ding, Xue-Mei, E-mail: X.M.Ding@outlook.com, & Tan, Jiu-Bin. A fiber-coupled displacement measuring interferometer for determination of the posture of a reflective surface. United States. doi:10.1063/1.4960661.
Mao, Shuai, Hu, Peng-Cheng, E-mail: hupc@hit.edu.cn, Ding, Xue-Mei, E-mail: X.M.Ding@outlook.com, and Tan, Jiu-Bin. 2016. "A fiber-coupled displacement measuring interferometer for determination of the posture of a reflective surface". United States. doi:10.1063/1.4960661.
@article{osti_22597657,
title = {A fiber-coupled displacement measuring interferometer for determination of the posture of a reflective surface},
author = {Mao, Shuai and Hu, Peng-Cheng, E-mail: hupc@hit.edu.cn and Ding, Xue-Mei, E-mail: X.M.Ding@outlook.com and Tan, Jiu-Bin},
abstractNote = {A fiber-coupled displacement measuring interferometer capable of determining of the posture of a reflective surface of a measuring mirror is proposed. The newly constructed instrument combines fiber-coupled displacement and angular measurement technologies. The proposed interferometer has advantages of both the fiber-coupled and the spatially beam-separated interferometer. A portable dual-position sensitive detector (PSD)-based unit within this proposed interferometer measures the parallelism of the two source beams to guide the fiber-coupling adjustment. The portable dual PSD-based unit measures not only the pitch and yaw of the retro-reflector but also measures the posture of the reflective surface. The experimental results of displacement calibration show that the deviations between the proposed interferometer and a reference one, Agilent 5530, at two different common beam directions are both less than ±35 nm, thus verifying the effectiveness of the beam parallelism measurement. The experimental results of angular calibration show that deviations of pitch and yaw with the auto-collimator (as a reference) are less than ±2 arc sec, thus proving the proposed interferometer’s effectiveness for determination of the posture of a reflective surface.},
doi = {10.1063/1.4960661},
journal = {Review of Scientific Instruments},
number = 8,
volume = 87,
place = {United States},
year = 2016,
month = 8
}
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