Donor and double-donor transitions of the carbon vacancy related EH{sub 6∕7} deep level in 4H-SiC
- Department of Physics, Chemistry and Biology (IFM), Semiconductor Materials Division, Linköping University, 581 83 Linköping (Sweden)
Using medium- and high-resolution multi-spectra fitting of deep level transient spectroscopy (DLTS), minority carrier transient spectroscopy (MCTS), optical O-DLTS and optical-electrical (OE)-MCTS measurements, we show that the EH{sub 6∕7} deep level in 4H-SiC is composed of two strongly overlapping, two electron emission processes with thermal activation energies of 1.49 eV and 1.58 eV for EH{sub 6} and 1.48 eV and 1.66 eV for EH{sub 7}. The electron emission peaks of EH{sub 7} completely overlap while the emission peaks of EH{sub 6} occur offset at slightly different temperatures in the spectra. OE-MCTS measurements of the hole capture cross section σ{sub p0}(T) in p-type samples reveal a trap-Auger process, whereby hole capture into the defect occupied by two electrons leads to a recombination event and the ejection of the second electron into the conduction band. Values of the hole and electron capture cross sections σ{sub n}(T) and σ{sub p}(T) differ strongly due to the donor like nature of the deep levels and while all σ{sub n}(T) have a negative temperature dependence, the σ{sub p}(T) appear to be temperature independent. Average values at the DLTS measurement temperature (∼600 K) are σ{sub n2+}(T) ≈ 1 × 10{sup −14} cm{sup 2}, σ{sub n+}(T) ≈ 1 × 10{sup −14} cm{sup 2}, and σ{sub p0}(T) ≈ 9 × 10{sup −18} cm{sup 2} for EH{sub 6} and σ{sub n2+}(T) ≈ 2 × 10{sup −14} cm{sup 2}, σ{sub n+}(T) ≈ 2 × 10{sup −14} cm{sup 2}, σ{sub p0}(T) ≈ 1 × 10{sup −20} cm{sup 2} for EH{sub 7}. Since EH{sub 7} has already been identified as a donor transition of the carbon vacancy, we propose that the EH{sub 6∕7} center in total represents the overlapping first and second donor transitions of the carbon vacancy defects on both inequivalent lattice sites.
- OSTI ID:
- 22596823
- Journal Information:
- Journal of Applied Physics, Vol. 119, Issue 23; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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