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Title: Microstructure and composition analysis of low-Z/low-Z multilayers by combining hard and resonant soft X-ray reflectivity

Abstract

Microstructure and composition analysis of periodic multilayer structure consisting of a low electron density contrast (EDC) material combination by grazing incidence hard X-ray reflectivity (GIXR), resonant soft X-ray reflectivity (RSXR), and transmission electron microscopy (TEM) are presented. Measurements of reflectivity at different energies allow combining the sensitivity of GIXR data to microstructural parameters like layer thicknesses and interfacing roughness, with the layer composition sensitivity of RSXR. These aspects are shown with an example of 10-period C/B{sub 4}C multilayer. TEM observation reveals that interfaces C on B{sub 4}C and B{sub 4}C on C are symmetric. Although GIXR provides limited structural information when EDC between layers is low, measurements using a scattering technique like GIXR with a microscopic technique like TEM improve the microstructural information of low EDC combination. The optical constants of buried layers have been derived by RSXR. The derived optical constants from the measured RSXR data suggested the presence of excess carbon into the boron carbide layer.

Authors:
; ; ; ;  [1];  [2];  [1]
  1. Indus Synchrotrons Utilization Division, Raja Ramanna Centre for Advanced Technology, Indore 452013 (India)
  2. (India)
Publication Date:
OSTI Identifier:
22596676
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 119; Journal Issue: 24; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; BORON CARBIDES; CARBON; ELECTRON DENSITY; GRAZING; HARD X RADIATION; LAYERS; MICROSTRUCTURE; PERIODICITY; REFLECTIVITY; ROUGHNESS; SCATTERING; SENSITIVITY; SOFT X RADIATION; THICKNESS; TRANSMISSION ELECTRON MICROSCOPY

Citation Formats

Rao, P. N., E-mail: pnrao@rrcat.gov.in, Rai, S. K., Srivastava, A. K., Ganguli, T., Naik, P. A., Homi Bhabha National Institute, Anushakti Nagar, Mumbai 400 094, and Dhawan, R. Microstructure and composition analysis of low-Z/low-Z multilayers by combining hard and resonant soft X-ray reflectivity. United States: N. p., 2016. Web. doi:10.1063/1.4954679.
Rao, P. N., E-mail: pnrao@rrcat.gov.in, Rai, S. K., Srivastava, A. K., Ganguli, T., Naik, P. A., Homi Bhabha National Institute, Anushakti Nagar, Mumbai 400 094, & Dhawan, R. Microstructure and composition analysis of low-Z/low-Z multilayers by combining hard and resonant soft X-ray reflectivity. United States. doi:10.1063/1.4954679.
Rao, P. N., E-mail: pnrao@rrcat.gov.in, Rai, S. K., Srivastava, A. K., Ganguli, T., Naik, P. A., Homi Bhabha National Institute, Anushakti Nagar, Mumbai 400 094, and Dhawan, R. Tue . "Microstructure and composition analysis of low-Z/low-Z multilayers by combining hard and resonant soft X-ray reflectivity". United States. doi:10.1063/1.4954679.
@article{osti_22596676,
title = {Microstructure and composition analysis of low-Z/low-Z multilayers by combining hard and resonant soft X-ray reflectivity},
author = {Rao, P. N., E-mail: pnrao@rrcat.gov.in and Rai, S. K. and Srivastava, A. K. and Ganguli, T. and Naik, P. A. and Homi Bhabha National Institute, Anushakti Nagar, Mumbai 400 094 and Dhawan, R.},
abstractNote = {Microstructure and composition analysis of periodic multilayer structure consisting of a low electron density contrast (EDC) material combination by grazing incidence hard X-ray reflectivity (GIXR), resonant soft X-ray reflectivity (RSXR), and transmission electron microscopy (TEM) are presented. Measurements of reflectivity at different energies allow combining the sensitivity of GIXR data to microstructural parameters like layer thicknesses and interfacing roughness, with the layer composition sensitivity of RSXR. These aspects are shown with an example of 10-period C/B{sub 4}C multilayer. TEM observation reveals that interfaces C on B{sub 4}C and B{sub 4}C on C are symmetric. Although GIXR provides limited structural information when EDC between layers is low, measurements using a scattering technique like GIXR with a microscopic technique like TEM improve the microstructural information of low EDC combination. The optical constants of buried layers have been derived by RSXR. The derived optical constants from the measured RSXR data suggested the presence of excess carbon into the boron carbide layer.},
doi = {10.1063/1.4954679},
journal = {Journal of Applied Physics},
number = 24,
volume = 119,
place = {United States},
year = {Tue Jun 28 00:00:00 EDT 2016},
month = {Tue Jun 28 00:00:00 EDT 2016}
}