skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Extreme ultraviolet radiation emitted by helium microwave driven plasmas

Abstract

The extreme ultraviolet radiation emitted by helium microwave-driven (2.45 GHz) plasmas operating at low-pressure conditions was investigated. Novel data regarding emitted spectral lines of excited helium atoms and ions in the 20–33 nm wavelength range and their intensity behavior with variation of discharge operational conditions are presented. The intensity of all the spectral emissions was found to strongly increase with the microwave power delivered to the plasma. Furthermore, the intensity of the ionic spectral emissions decreases by nearly one order of magnitude as the pressure was raised from 0.2 to 0.5 mbar.

Authors:
; ; ;  [1]
  1. Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, 1049-001 Lisboa (Portugal)
Publication Date:
OSTI Identifier:
22596663
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 119; Journal Issue: 24; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ATOMS; EMISSION; EXTREME ULTRAVIOLET RADIATION; GHZ RANGE 01-100; HELIUM; MICROWAVE RADIATION; PLASMA; WAVELENGTHS

Citation Formats

Espinho, S., Felizardo, E., Tatarova, E., E-mail: e.tatarova@tecnico.ulisboa.pt, and Alves, L. L. Extreme ultraviolet radiation emitted by helium microwave driven plasmas. United States: N. p., 2016. Web. doi:10.1063/1.4954850.
Espinho, S., Felizardo, E., Tatarova, E., E-mail: e.tatarova@tecnico.ulisboa.pt, & Alves, L. L. Extreme ultraviolet radiation emitted by helium microwave driven plasmas. United States. doi:10.1063/1.4954850.
Espinho, S., Felizardo, E., Tatarova, E., E-mail: e.tatarova@tecnico.ulisboa.pt, and Alves, L. L. Tue . "Extreme ultraviolet radiation emitted by helium microwave driven plasmas". United States. doi:10.1063/1.4954850.
@article{osti_22596663,
title = {Extreme ultraviolet radiation emitted by helium microwave driven plasmas},
author = {Espinho, S. and Felizardo, E. and Tatarova, E., E-mail: e.tatarova@tecnico.ulisboa.pt and Alves, L. L.},
abstractNote = {The extreme ultraviolet radiation emitted by helium microwave-driven (2.45 GHz) plasmas operating at low-pressure conditions was investigated. Novel data regarding emitted spectral lines of excited helium atoms and ions in the 20–33 nm wavelength range and their intensity behavior with variation of discharge operational conditions are presented. The intensity of all the spectral emissions was found to strongly increase with the microwave power delivered to the plasma. Furthermore, the intensity of the ionic spectral emissions decreases by nearly one order of magnitude as the pressure was raised from 0.2 to 0.5 mbar.},
doi = {10.1063/1.4954850},
journal = {Journal of Applied Physics},
number = 24,
volume = 119,
place = {United States},
year = {Tue Jun 28 00:00:00 EDT 2016},
month = {Tue Jun 28 00:00:00 EDT 2016}
}