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Title: Thermoacoustic and thermoreflectance imaging of biased integrated circuits: Voltage and temperature maps

Abstract

In this work a combined thermoacoustic and thermoreflectance set-up was designed for imaging biased microelectronic circuits. In particular, it was used with polycrystalline silicon resistive tracks grown on a monocrystalline Si substrate mounted on a test chip. Thermoreflectance images, obtained by scanning a probe laser beam on the sample surface, clearly show the regions periodically heated by Joule effect, which are associated to the electric current distribution in the circuit. The thermoacoustic signal, detected by a pyroelectric/piezoelectric sensor beneath the chip, also discloses the Joule contribution of the whole sample. However, additional information emerges when a non-modulated laser beam is focused on the sample surface in a raster scan mode allowing imaging of the sample. The distribution of this supplementary signal is related to the voltage distribution along the circuit.

Authors:
;  [1];  [2];  [3];  [2]; ;  [3]; ;  [1]
  1. Gleb Wataghin Physics Institute, University of Campinas - Unicamp, 13083-859 Campinas, SP (Brazil)
  2. (Mexico)
  3. Instituto Politécnico Nacional, Centro de Investigación en Ciencia Aplicada y Tecnología Avanzada, Legaria 694, Colonia Irrigación, CP 11500, México, DF (Mexico)
Publication Date:
OSTI Identifier:
22594437
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 109; Journal Issue: 4; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; BEAMS; DISTRIBUTION; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; IMAGES; INTEGRATED CIRCUITS; LASERS; PARTICLE TRACKS; PERIODICITY; PIEZOELECTRICITY; POLYCRYSTALS; SENSORS; SIGNALS; SILICON; SUBSTRATES; SURFACES

Citation Formats

Hernández-Rosales, E., Cedeño, E., Instituto Politécnico Nacional, Centro de Investigación en Ciencia Aplicada y Tecnología Avanzada, Legaria 694, Colonia Irrigación, CP 11500, México, DF, Hernandez-Wong, J., CONACYT, México, DF, México, Rojas-Trigos, J. B., Marin, E., Gandra, F. C. G., and Mansanares, A. M., E-mail: manoel@ifi.unicamp.br. Thermoacoustic and thermoreflectance imaging of biased integrated circuits: Voltage and temperature maps. United States: N. p., 2016. Web. doi:10.1063/1.4959828.
Hernández-Rosales, E., Cedeño, E., Instituto Politécnico Nacional, Centro de Investigación en Ciencia Aplicada y Tecnología Avanzada, Legaria 694, Colonia Irrigación, CP 11500, México, DF, Hernandez-Wong, J., CONACYT, México, DF, México, Rojas-Trigos, J. B., Marin, E., Gandra, F. C. G., & Mansanares, A. M., E-mail: manoel@ifi.unicamp.br. Thermoacoustic and thermoreflectance imaging of biased integrated circuits: Voltage and temperature maps. United States. doi:10.1063/1.4959828.
Hernández-Rosales, E., Cedeño, E., Instituto Politécnico Nacional, Centro de Investigación en Ciencia Aplicada y Tecnología Avanzada, Legaria 694, Colonia Irrigación, CP 11500, México, DF, Hernandez-Wong, J., CONACYT, México, DF, México, Rojas-Trigos, J. B., Marin, E., Gandra, F. C. G., and Mansanares, A. M., E-mail: manoel@ifi.unicamp.br. 2016. "Thermoacoustic and thermoreflectance imaging of biased integrated circuits: Voltage and temperature maps". United States. doi:10.1063/1.4959828.
@article{osti_22594437,
title = {Thermoacoustic and thermoreflectance imaging of biased integrated circuits: Voltage and temperature maps},
author = {Hernández-Rosales, E. and Cedeño, E. and Instituto Politécnico Nacional, Centro de Investigación en Ciencia Aplicada y Tecnología Avanzada, Legaria 694, Colonia Irrigación, CP 11500, México, DF and Hernandez-Wong, J. and CONACYT, México, DF, México and Rojas-Trigos, J. B. and Marin, E. and Gandra, F. C. G. and Mansanares, A. M., E-mail: manoel@ifi.unicamp.br},
abstractNote = {In this work a combined thermoacoustic and thermoreflectance set-up was designed for imaging biased microelectronic circuits. In particular, it was used with polycrystalline silicon resistive tracks grown on a monocrystalline Si substrate mounted on a test chip. Thermoreflectance images, obtained by scanning a probe laser beam on the sample surface, clearly show the regions periodically heated by Joule effect, which are associated to the electric current distribution in the circuit. The thermoacoustic signal, detected by a pyroelectric/piezoelectric sensor beneath the chip, also discloses the Joule contribution of the whole sample. However, additional information emerges when a non-modulated laser beam is focused on the sample surface in a raster scan mode allowing imaging of the sample. The distribution of this supplementary signal is related to the voltage distribution along the circuit.},
doi = {10.1063/1.4959828},
journal = {Applied Physics Letters},
number = 4,
volume = 109,
place = {United States},
year = 2016,
month = 7
}