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Title: Switchable and tunable film bulk acoustic resonator fabricated using barium strontium titanate active layer and Ta{sub 2}O{sub 5}/SiO{sub 2} acoustic reflector

Abstract

A solidly mounted acoustic resonator was fabricated using a Ba{sub 0.60}Sr{sub 0.40}TiO{sub 3} (BST) film deposited by metal organic chemical vapor deposition. The device was acoustically isolated from the substrate using a Bragg reflector consisting of three pairs of Ta{sub 2}O{sub 5}/SiO{sub 2} layers deposited by chemical solution deposition. Transmission electron microscopy verified that the Bragg reflector was not affected by the high temperatures and oxidizing conditions necessary to process high quality BST films. Electrical characterization of the resonator demonstrated a quality factor (Q) of 320 and an electromechanical coupling coefficient (K{sub t}{sup 2}) of 7.0% at 11 V.

Authors:
;  [1]; ;  [2]; ; ; ;  [3]
  1. Structured Materials Industries, Inc., Piscataway, New Jersey 08854 (United States)
  2. Department of Electrical and Computer Engineering, Colorado State University at Colorado Springs, Colorado Springs, Colorado 80933 (United States)
  3. Department of Materials Science and Engineering and Institute of Materials Science, University of Connecticut, Storrs, Connecticut 06269 (United States)
Publication Date:
OSTI Identifier:
22594396
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 109; Journal Issue: 5; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ACOUSTICS; BARIUM COMPOUNDS; CHEMICAL VAPOR DEPOSITION; DEPOSITS; FILMS; LAYERS; ORGANOMETALLIC COMPOUNDS; QUALITY FACTOR; RESONATORS; SILICA; SILICON OXIDES; STRONTIUM; STRONTIUM TITANATES; SUBSTRATES; TANTALUM OXIDES; TEMPERATURE RANGE 0400-1000 K; TRANSMISSION ELECTRON MICROSCOPY

Citation Formats

Sbrockey, N. M., E-mail: sbrockey@structuredmaterials.com, Tompa, G. S., Kalkur, T. S., Mansour, A., Khassaf, H., Yu, H., Aindow, M., and Alpay, S. P. Switchable and tunable film bulk acoustic resonator fabricated using barium strontium titanate active layer and Ta{sub 2}O{sub 5}/SiO{sub 2} acoustic reflector. United States: N. p., 2016. Web. doi:10.1063/1.4960361.
Sbrockey, N. M., E-mail: sbrockey@structuredmaterials.com, Tompa, G. S., Kalkur, T. S., Mansour, A., Khassaf, H., Yu, H., Aindow, M., & Alpay, S. P. Switchable and tunable film bulk acoustic resonator fabricated using barium strontium titanate active layer and Ta{sub 2}O{sub 5}/SiO{sub 2} acoustic reflector. United States. doi:10.1063/1.4960361.
Sbrockey, N. M., E-mail: sbrockey@structuredmaterials.com, Tompa, G. S., Kalkur, T. S., Mansour, A., Khassaf, H., Yu, H., Aindow, M., and Alpay, S. P. Mon . "Switchable and tunable film bulk acoustic resonator fabricated using barium strontium titanate active layer and Ta{sub 2}O{sub 5}/SiO{sub 2} acoustic reflector". United States. doi:10.1063/1.4960361.
@article{osti_22594396,
title = {Switchable and tunable film bulk acoustic resonator fabricated using barium strontium titanate active layer and Ta{sub 2}O{sub 5}/SiO{sub 2} acoustic reflector},
author = {Sbrockey, N. M., E-mail: sbrockey@structuredmaterials.com and Tompa, G. S. and Kalkur, T. S. and Mansour, A. and Khassaf, H. and Yu, H. and Aindow, M. and Alpay, S. P.},
abstractNote = {A solidly mounted acoustic resonator was fabricated using a Ba{sub 0.60}Sr{sub 0.40}TiO{sub 3} (BST) film deposited by metal organic chemical vapor deposition. The device was acoustically isolated from the substrate using a Bragg reflector consisting of three pairs of Ta{sub 2}O{sub 5}/SiO{sub 2} layers deposited by chemical solution deposition. Transmission electron microscopy verified that the Bragg reflector was not affected by the high temperatures and oxidizing conditions necessary to process high quality BST films. Electrical characterization of the resonator demonstrated a quality factor (Q) of 320 and an electromechanical coupling coefficient (K{sub t}{sup 2}) of 7.0% at 11 V.},
doi = {10.1063/1.4960361},
journal = {Applied Physics Letters},
number = 5,
volume = 109,
place = {United States},
year = {Mon Aug 01 00:00:00 EDT 2016},
month = {Mon Aug 01 00:00:00 EDT 2016}
}