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Title: Detection of atomic force microscopy cantilever displacement with a transmitted electron beam

Abstract

The response time of an atomic force microscopy (AFM) cantilever can be decreased by reducing cantilever size; however, the fastest AFM cantilevers are currently nearing the smallest size that can be detected with the conventional optical lever approach. Here, we demonstrate an electron beam detection scheme for measuring AFM cantilever oscillations. The oscillating AFM tip is positioned perpendicular to and in the path of a stationary focused nanometer sized electron beam. As the tip oscillates, the thickness of the material under the electron beam changes, causing a fluctuation in the number of scattered transmitted electrons that are detected. We demonstrate detection of sub-nanometer vibration amplitudes with an electron beam, providing a pathway for dynamic AFM with cantilevers that are orders of magnitude smaller and faster than the current state of the art.

Authors:
; ; ;  [1]
  1. Material Measurement Lab, National Institute of Standards and Technology, Boulder, Colorado 80305 (United States)
Publication Date:
OSTI Identifier:
22594382
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 109; Journal Issue: 4; Other Information: (c) 2016 U.S. Government; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; AMPLITUDES; ATOMIC FORCE MICROSCOPY; DETECTION; ELECTRON BEAMS; ELECTRONS; FLUCTUATIONS; OSCILLATIONS; THICKNESS

Citation Formats

Wagner, R., Woehl, T. J., Keller, R. R., and Killgore, J. P. Detection of atomic force microscopy cantilever displacement with a transmitted electron beam. United States: N. p., 2016. Web. doi:10.1063/1.4960192.
Wagner, R., Woehl, T. J., Keller, R. R., & Killgore, J. P. Detection of atomic force microscopy cantilever displacement with a transmitted electron beam. United States. doi:10.1063/1.4960192.
Wagner, R., Woehl, T. J., Keller, R. R., and Killgore, J. P. Mon . "Detection of atomic force microscopy cantilever displacement with a transmitted electron beam". United States. doi:10.1063/1.4960192.
@article{osti_22594382,
title = {Detection of atomic force microscopy cantilever displacement with a transmitted electron beam},
author = {Wagner, R. and Woehl, T. J. and Keller, R. R. and Killgore, J. P.},
abstractNote = {The response time of an atomic force microscopy (AFM) cantilever can be decreased by reducing cantilever size; however, the fastest AFM cantilevers are currently nearing the smallest size that can be detected with the conventional optical lever approach. Here, we demonstrate an electron beam detection scheme for measuring AFM cantilever oscillations. The oscillating AFM tip is positioned perpendicular to and in the path of a stationary focused nanometer sized electron beam. As the tip oscillates, the thickness of the material under the electron beam changes, causing a fluctuation in the number of scattered transmitted electrons that are detected. We demonstrate detection of sub-nanometer vibration amplitudes with an electron beam, providing a pathway for dynamic AFM with cantilevers that are orders of magnitude smaller and faster than the current state of the art.},
doi = {10.1063/1.4960192},
journal = {Applied Physics Letters},
number = 4,
volume = 109,
place = {United States},
year = {Mon Jul 25 00:00:00 EDT 2016},
month = {Mon Jul 25 00:00:00 EDT 2016}
}