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Title: Tailored probes for atomic force microscopy fabricated by two-photon polymerization

Abstract

3D direct laser writing based on two-photon polymerization is considered as a tool to fabricate tailored probes for atomic force microscopy. Tips with radii of 25 nm and arbitrary shape are attached to conventionally shaped micro-machined cantilevers. Long-term scanning measurements reveal low wear rates and demonstrate the reliability of such tips. Furthermore, we show that the resonance spectrum of the probe can be tuned for multi-frequency applications by adding rebar structures to the cantilever.

Authors:
 [1]; ; ;  [2];  [3]; ; ;  [2];  [1];  [4]
  1. Institute of Nanotechnology (INT), Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen (Germany)
  2. Institute for Microstructure Technology (IMT), Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen (Germany)
  3. (IPQ), Karlsruhe Institute of Technology (KIT), Engesserstraße 5, 76131 Karlsruhe (Germany)
  4. (APH), Karlsruhe Institute of Technology (KIT), Wolfgang-Gaede-Straße 1, 76131 Karlsruhe (Germany)
Publication Date:
OSTI Identifier:
22594356
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 109; Journal Issue: 6; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ATOMIC FORCE MICROSCOPY; LASERS; PHOTONS; POLYMERIZATION; PROBES; RELIABILITY; RESONANCE; THREE-DIMENSIONAL CALCULATIONS

Citation Formats

Göring, Gerald, Dietrich, Philipp-Immanuel, Blaicher, Matthias, Koos, Christian, Institute of Photonics and Quantum Electronics, Sharma, Swati, Korvink, Jan G., Hölscher, Hendrik, E-mail: hendrik.hoelscher@kit.edu, Schimmel, Thomas, and Institute of Applied Physics. Tailored probes for atomic force microscopy fabricated by two-photon polymerization. United States: N. p., 2016. Web. doi:10.1063/1.4960386.
Göring, Gerald, Dietrich, Philipp-Immanuel, Blaicher, Matthias, Koos, Christian, Institute of Photonics and Quantum Electronics, Sharma, Swati, Korvink, Jan G., Hölscher, Hendrik, E-mail: hendrik.hoelscher@kit.edu, Schimmel, Thomas, & Institute of Applied Physics. Tailored probes for atomic force microscopy fabricated by two-photon polymerization. United States. doi:10.1063/1.4960386.
Göring, Gerald, Dietrich, Philipp-Immanuel, Blaicher, Matthias, Koos, Christian, Institute of Photonics and Quantum Electronics, Sharma, Swati, Korvink, Jan G., Hölscher, Hendrik, E-mail: hendrik.hoelscher@kit.edu, Schimmel, Thomas, and Institute of Applied Physics. Mon . "Tailored probes for atomic force microscopy fabricated by two-photon polymerization". United States. doi:10.1063/1.4960386.
@article{osti_22594356,
title = {Tailored probes for atomic force microscopy fabricated by two-photon polymerization},
author = {Göring, Gerald and Dietrich, Philipp-Immanuel and Blaicher, Matthias and Koos, Christian and Institute of Photonics and Quantum Electronics and Sharma, Swati and Korvink, Jan G. and Hölscher, Hendrik, E-mail: hendrik.hoelscher@kit.edu and Schimmel, Thomas and Institute of Applied Physics},
abstractNote = {3D direct laser writing based on two-photon polymerization is considered as a tool to fabricate tailored probes for atomic force microscopy. Tips with radii of 25 nm and arbitrary shape are attached to conventionally shaped micro-machined cantilevers. Long-term scanning measurements reveal low wear rates and demonstrate the reliability of such tips. Furthermore, we show that the resonance spectrum of the probe can be tuned for multi-frequency applications by adding rebar structures to the cantilever.},
doi = {10.1063/1.4960386},
journal = {Applied Physics Letters},
number = 6,
volume = 109,
place = {United States},
year = {Mon Aug 08 00:00:00 EDT 2016},
month = {Mon Aug 08 00:00:00 EDT 2016}
}
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