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Title: New leak assembly based on fluidic nanochannels

Abstract

Fluidic nanochannels with a characteristic dimension of ∼280 nm were fabricated and designed as a leak assembly, where the nanochannels were formed on silicon wafers and enclosed with Pyrex{sup ®} glass. The geometric dimensions were characterized by scanning electron microscopy, and the gas flow conductance of He and other heavy gases (N{sub 2}, O{sub 2}, and Ar) was measured, and its uncertainty estimated, by the difference method. The results indicated that the measured flow conductance values were 45% less than the calculated flow conductance values. For helium, molecular flow was shown to occur at pressures ranging from vacuum to atmospheric pressure. As a consequence of the well-defined geometry, the prediction of flow conductance could be achieved for various gas species.

Authors:
; ;  [1]; ; ;  [2];  [3]
  1. School of Mechanical and Automobile Engineering, Hefei University of Technology, Hefei 230031 (China)
  2. National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029 (China)
  3. Shanghai Institute of Spacecraft Equipment, Shanghai 201100 (China)
Publication Date:
OSTI Identifier:
22592848
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 34; Journal Issue: 5; Other Information: (c) 2016 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; ATMOSPHERIC PRESSURE; FLUIDIC DEVICES; FORECASTING; GAS FLOW; GEOMETRY; HELIUM; LEAKS; NANOSTRUCTURES; PYREX; SCANNING ELECTRON MICROSCOPY; SILICON

Citation Formats

Zhu, Aiqing, Zhao, Yongheng, Wang, Xudi, E-mail: wxudi@hfut.edu.cn, Wang, Yu, Wei, Wei, Qiu, Keqiang, and Dong, Dong. New leak assembly based on fluidic nanochannels. United States: N. p., 2016. Web. doi:10.1116/1.4960646.
Zhu, Aiqing, Zhao, Yongheng, Wang, Xudi, E-mail: wxudi@hfut.edu.cn, Wang, Yu, Wei, Wei, Qiu, Keqiang, & Dong, Dong. New leak assembly based on fluidic nanochannels. United States. doi:10.1116/1.4960646.
Zhu, Aiqing, Zhao, Yongheng, Wang, Xudi, E-mail: wxudi@hfut.edu.cn, Wang, Yu, Wei, Wei, Qiu, Keqiang, and Dong, Dong. Thu . "New leak assembly based on fluidic nanochannels". United States. doi:10.1116/1.4960646.
@article{osti_22592848,
title = {New leak assembly based on fluidic nanochannels},
author = {Zhu, Aiqing and Zhao, Yongheng and Wang, Xudi, E-mail: wxudi@hfut.edu.cn and Wang, Yu and Wei, Wei and Qiu, Keqiang and Dong, Dong},
abstractNote = {Fluidic nanochannels with a characteristic dimension of ∼280 nm were fabricated and designed as a leak assembly, where the nanochannels were formed on silicon wafers and enclosed with Pyrex{sup ®} glass. The geometric dimensions were characterized by scanning electron microscopy, and the gas flow conductance of He and other heavy gases (N{sub 2}, O{sub 2}, and Ar) was measured, and its uncertainty estimated, by the difference method. The results indicated that the measured flow conductance values were 45% less than the calculated flow conductance values. For helium, molecular flow was shown to occur at pressures ranging from vacuum to atmospheric pressure. As a consequence of the well-defined geometry, the prediction of flow conductance could be achieved for various gas species.},
doi = {10.1116/1.4960646},
journal = {Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films},
number = 5,
volume = 34,
place = {United States},
year = {Thu Sep 15 00:00:00 EDT 2016},
month = {Thu Sep 15 00:00:00 EDT 2016}
}