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Title: Low-cost, high-performance nonevaporable getter pumps using nonevaporable getter pills

Abstract

Nonevaporable getter (NEG) pumps are widely used for maintaining a clean ultrahigh vacuum (UHV) of ≤10{sup −8 }Pa because of their high pumping speeds for hydrogen (H{sub 2}) and active gases in the UHV region. In addition, they are oil free, evaporation free, sputtering free, sublimation free, magnetic field free, vibration free, economical, compact, lightweight, and energy saving. In the present paper, the authors report a new NEG pump which is composed of commercial 60 NEG pills (ϕ10 × 3 mm; 70 wt. % Zr, 24.6 wt. % V, and 5.4 wt. % Fe), titanium parts, a DN 40 conflat flange, and a tantalum heater. The NEG pills are vertically and radially aligned around the heater to maximize the effective area for pumping. After activation at 400 °C for 30 min, the pumping speeds of the NEG pump were measured with the orifice method. Pumping speeds of 140–130, 200–140, 190–130, and 35–17 l/s were estimated for H{sub 2}, CO, CO{sub 2}, and N{sub 2} gasses, respectively, in a pumped-quantity range of 0.01–0.1 Pa l. Since the NEG pump is composed of a heating unit and a NEG module, the pumping speeds can be improved by increasing the number of NEG modules. These NEG pumps are favorable alternatives to sputtering ionmore » pumps or titanium sublimation pumps.« less

Authors:
; ;  [1]; ;  [2]; ;  [3]
  1. Faculty of Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya-ku, Yokohama 240-8501 (Japan)
  2. Faculty of Engineering, Chiba University, 1-33 Yayoi-cho, Inage-ku 263-8522 (Japan)
  3. Institute of Materials Structure Science, KEK, 1-1 Oho, Tsukuba 305-0801 (Japan)
Publication Date:
OSTI Identifier:
22592841
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 34; Journal Issue: 5; Other Information: (c) 2016 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 42 ENGINEERING; CARBON; CARBON DIOXIDE; CARBON MONOXIDE; GASES; GETTERS; HEATERS; HEATING; HYDROGEN; IONS; MAGNETIC FIELDS; ORIFICES; PUMPING; SPUTTERING; SUBLIMATION; TANTALUM; TITANIUM; VELOCITY

Citation Formats

Kodama, Hiraku, Ohno, Shinya, Tanaka, Masatoshi, Tanaka, Masato, Okudaira, Koji K., Mase, Kazuhiko, E-mail: mase@post.kek.jp, and Kikuchi, Takashi. Low-cost, high-performance nonevaporable getter pumps using nonevaporable getter pills. United States: N. p., 2016. Web. doi:10.1116/1.4961050.
Kodama, Hiraku, Ohno, Shinya, Tanaka, Masatoshi, Tanaka, Masato, Okudaira, Koji K., Mase, Kazuhiko, E-mail: mase@post.kek.jp, & Kikuchi, Takashi. Low-cost, high-performance nonevaporable getter pumps using nonevaporable getter pills. United States. doi:10.1116/1.4961050.
Kodama, Hiraku, Ohno, Shinya, Tanaka, Masatoshi, Tanaka, Masato, Okudaira, Koji K., Mase, Kazuhiko, E-mail: mase@post.kek.jp, and Kikuchi, Takashi. Thu . "Low-cost, high-performance nonevaporable getter pumps using nonevaporable getter pills". United States. doi:10.1116/1.4961050.
@article{osti_22592841,
title = {Low-cost, high-performance nonevaporable getter pumps using nonevaporable getter pills},
author = {Kodama, Hiraku and Ohno, Shinya and Tanaka, Masatoshi and Tanaka, Masato and Okudaira, Koji K. and Mase, Kazuhiko, E-mail: mase@post.kek.jp and Kikuchi, Takashi},
abstractNote = {Nonevaporable getter (NEG) pumps are widely used for maintaining a clean ultrahigh vacuum (UHV) of ≤10{sup −8 }Pa because of their high pumping speeds for hydrogen (H{sub 2}) and active gases in the UHV region. In addition, they are oil free, evaporation free, sputtering free, sublimation free, magnetic field free, vibration free, economical, compact, lightweight, and energy saving. In the present paper, the authors report a new NEG pump which is composed of commercial 60 NEG pills (ϕ10 × 3 mm; 70 wt. % Zr, 24.6 wt. % V, and 5.4 wt. % Fe), titanium parts, a DN 40 conflat flange, and a tantalum heater. The NEG pills are vertically and radially aligned around the heater to maximize the effective area for pumping. After activation at 400 °C for 30 min, the pumping speeds of the NEG pump were measured with the orifice method. Pumping speeds of 140–130, 200–140, 190–130, and 35–17 l/s were estimated for H{sub 2}, CO, CO{sub 2}, and N{sub 2} gasses, respectively, in a pumped-quantity range of 0.01–0.1 Pa l. Since the NEG pump is composed of a heating unit and a NEG module, the pumping speeds can be improved by increasing the number of NEG modules. These NEG pumps are favorable alternatives to sputtering ion pumps or titanium sublimation pumps.},
doi = {10.1116/1.4961050},
journal = {Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films},
number = 5,
volume = 34,
place = {United States},
year = {Thu Sep 15 00:00:00 EDT 2016},
month = {Thu Sep 15 00:00:00 EDT 2016}
}