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Title: Anti-phase boundaries at the SrTiO{sub 3}/Si(001) interface studied using aberration-corrected scanning transmission electron microscopy

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4943135· OSTI ID:22591758
 [1];  [2]; ;  [3];  [4]
  1. School of Engineering for Matter, Transport, and Energy, Arizona State University, Tempe, Arizona 85287 (United States)
  2. LeRoy Eyring Center for Solid State Science, Arizona State University, Tempe, Arizona 85287 (United States)
  3. Department of Physics, The University of Texas at Austin, Austin, Texas 78712 (United States)
  4. Department of Physics, Arizona State University, Tempe, Arizona 85287 (United States)

In this work, the atomic structure of anti-phase boundary defects at the SrTiO{sub 3}/Si (001) interface is investigated by aberration-corrected scanning transmission electron microscopy. Atomic-resolution images reveal an abrupt SrTiO{sub 3}/Si interface with no intermediate oxide layer. Both single and double Si atomic columns (“dumbbells”) from different terraces of the Si(001) surface are visible at the interface. Anti-phase boundaries (APB) consisting of two adjacent TiO{sub 2} planes in the SrTiO{sub 3} (STO) film resulting either from Si surface steps or from the merging of crystalline domains from different surface nucleation sites are identified. These APBs occur on either {110} or {010} planes and both types have displacement vectors of a{sub STO}/2〈110〉.

OSTI ID:
22591758
Journal Information:
Applied Physics Letters, Vol. 108, Issue 9; Other Information: (c) 2016 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English