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Title: Direct laser writing of polymeric nanostructures via optically induced local thermal effect

Abstract

We demonstrate the fabrication of desired structures with feature size below the diffraction limit by use of a positive photoresist. The direct laser writing technique employing a continuous-wave laser was used to optically induce a local thermal effect in a positive photoresist, which then allowed the formation of solid nanostructures. This technique enabled us to realize multi-dimensional sub-microstructures by use of a positive photoresist, with a feature size down to 57 nm. This mechanism acting on positive photoresists opens a simple and low-cost way for nanofabrication.

Authors:
 [1]; ; ; ; ;
  1. Laboratoire de Photonique Quantique et Moléculaire, UMR 8537, École Normale Supérieure de Cachan, CentraleSupélec, CNRS, Université Paris-Saclay, 61 avenue du Président Wilson, 94235 Cachan (France)
Publication Date:
OSTI Identifier:
22591679
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 108; Journal Issue: 18; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; DIFFRACTION; FABRICATION; LASERS; MICROSTRUCTURE; NANOSTRUCTURES

Citation Formats

Tong, Quang Cong, Institute of Materials Science, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet, Cau Giay, 10000 Hanoi, Nguyen, Dam Thuy Trang, Do, Minh Thanh, Luong, Mai Hoang, Journet, Bernard, Ledoux-Rak, Isabelle, and Lai, Ngoc Diep, E-mail: nlai@lpqm.ens-cachan.fr. Direct laser writing of polymeric nanostructures via optically induced local thermal effect. United States: N. p., 2016. Web. doi:10.1063/1.4948589.
Tong, Quang Cong, Institute of Materials Science, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet, Cau Giay, 10000 Hanoi, Nguyen, Dam Thuy Trang, Do, Minh Thanh, Luong, Mai Hoang, Journet, Bernard, Ledoux-Rak, Isabelle, & Lai, Ngoc Diep, E-mail: nlai@lpqm.ens-cachan.fr. Direct laser writing of polymeric nanostructures via optically induced local thermal effect. United States. https://doi.org/10.1063/1.4948589
Tong, Quang Cong, Institute of Materials Science, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet, Cau Giay, 10000 Hanoi, Nguyen, Dam Thuy Trang, Do, Minh Thanh, Luong, Mai Hoang, Journet, Bernard, Ledoux-Rak, Isabelle, and Lai, Ngoc Diep, E-mail: nlai@lpqm.ens-cachan.fr. 2016. "Direct laser writing of polymeric nanostructures via optically induced local thermal effect". United States. https://doi.org/10.1063/1.4948589.
@article{osti_22591679,
title = {Direct laser writing of polymeric nanostructures via optically induced local thermal effect},
author = {Tong, Quang Cong and Institute of Materials Science, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet, Cau Giay, 10000 Hanoi and Nguyen, Dam Thuy Trang and Do, Minh Thanh and Luong, Mai Hoang and Journet, Bernard and Ledoux-Rak, Isabelle and Lai, Ngoc Diep, E-mail: nlai@lpqm.ens-cachan.fr},
abstractNote = {We demonstrate the fabrication of desired structures with feature size below the diffraction limit by use of a positive photoresist. The direct laser writing technique employing a continuous-wave laser was used to optically induce a local thermal effect in a positive photoresist, which then allowed the formation of solid nanostructures. This technique enabled us to realize multi-dimensional sub-microstructures by use of a positive photoresist, with a feature size down to 57 nm. This mechanism acting on positive photoresists opens a simple and low-cost way for nanofabrication.},
doi = {10.1063/1.4948589},
url = {https://www.osti.gov/biblio/22591679}, journal = {Applied Physics Letters},
issn = {0003-6951},
number = 18,
volume = 108,
place = {United States},
year = {Mon May 02 00:00:00 EDT 2016},
month = {Mon May 02 00:00:00 EDT 2016}
}