Static deflection analysis of non prismatic multilayer p-NEMS cantilevers under electrical load

Journal Article · Wed Apr 13 00:00:00 EDT 2016 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4945229· OSTI ID:22591107

Muruganand, S. ^[1]

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1. Assistant professor, Department of Electronics and Instrumentation, Bharathiar University, Coimbatore-46 (India)

Deflection of Euler-Bernoulli non prismatic multilayer piezoelectric nano electromechanical (p-NEMS) cantilever beams have been studied theoretically for various profiles of p-NEMS cantilevers by applying the electrical load. This problem has been answered by applying the boundary conditions derived by simple polynomials. This method is applied for various profiles like rectangular and trapezoidal by varying the thickness of the piezoelectric layer as well as the material. The obtained results provide the better deflection for trapezoidal profile with ZnO piezo electric layer of suitable nano cantilevers for nano scale applications.

• OSTI ID: 22591107
• Journal Information: AIP Conference Proceedings, Vol. 1724, Issue 1; Conference: ETMN-2015: 2. international conference on emerging technologies: Micro to nano 2015, Rajasthan (India), 24-25 Oct 2015; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BOUNDARY CONDITIONS
DIFFERENTIAL EQUATIONS
ELASTICITY
LAYERS
NANOSTRUCTURES
NEMS
PIEZOELECTRICITY
POLYNOMIALS
THICKNESS
ZINC OXIDES