# Nanofilm thickness measurement by resonant frequencies

## Abstract

We report a theoretical investigation of monochromatic laser light – thin metal film interaction. The dependences of transmission, reflection and absorption coefficients of an electromagnetic wave on the incidence angle, layer thickness and effective electron collision frequency are obtained. The above coefficients are analysed in the region of resonant frequencies. The resulting formula for the transmission, reflection and absorption coefficients are found to be valid for any angles of incidence. The case of mirror boundary conditions is considered. A formula is derived for contactless measurement of the film thickness by the observed resonant frequencies. (laser applications and other topics in quantum electronics)

- Authors:

- Moscow State Region University (Russian Federation)

- Publication Date:

- OSTI Identifier:
- 22551298

- Resource Type:
- Journal Article

- Resource Relation:
- Journal Name: Quantum Electronics (Woodbury, N.Y.); Journal Volume: 45; Journal Issue: 3; Other Information: Country of input: International Atomic Energy Agency (IAEA)

- Country of Publication:
- United States

- Language:
- English

- Subject:
- 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ABSORPTION; BOUNDARY CONDITIONS; ELECTRON COLLISIONS; INCIDENCE ANGLE; LASER RADIATION; METALS; MONOCHROMATIC RADIATION; REFLECTION; THICKNESS; THIN FILMS; TRANSMISSION

### Citation Formats

```
Latyshev, A V, and Yushkanov, A A.
```*Nanofilm thickness measurement by resonant frequencies*. United States: N. p., 2015.
Web. doi:10.1070/QE2015V045N03ABEH015379.

```
Latyshev, A V, & Yushkanov, A A.
```*Nanofilm thickness measurement by resonant frequencies*. United States. doi:10.1070/QE2015V045N03ABEH015379.

```
Latyshev, A V, and Yushkanov, A A. Tue .
"Nanofilm thickness measurement by resonant frequencies". United States.
doi:10.1070/QE2015V045N03ABEH015379.
```

```
@article{osti_22551298,
```

title = {Nanofilm thickness measurement by resonant frequencies},

author = {Latyshev, A V and Yushkanov, A A},

abstractNote = {We report a theoretical investigation of monochromatic laser light – thin metal film interaction. The dependences of transmission, reflection and absorption coefficients of an electromagnetic wave on the incidence angle, layer thickness and effective electron collision frequency are obtained. The above coefficients are analysed in the region of resonant frequencies. The resulting formula for the transmission, reflection and absorption coefficients are found to be valid for any angles of incidence. The case of mirror boundary conditions is considered. A formula is derived for contactless measurement of the film thickness by the observed resonant frequencies. (laser applications and other topics in quantum electronics)},

doi = {10.1070/QE2015V045N03ABEH015379},

journal = {Quantum Electronics (Woodbury, N.Y.)},

number = 3,

volume = 45,

place = {United States},

year = {Tue Mar 31 00:00:00 EDT 2015},

month = {Tue Mar 31 00:00:00 EDT 2015}

}

Other availability

Save to My Library

You must Sign In or Create an Account in order to save documents to your library.