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Title: Optical response of columnar TiO{sub 2}:Co on Si substrate

Abstract

Vertically arranged columnar TiO{sub 2}:Co structure has been deposited on Si (100) substrate using the metal organic chemical vapor deposition (MOCVD) technique. SEM images confirm the columnar structure of the TiO{sub 2}:Co layer on Si (100). Concentration of the Co dopant has been defined by means of the energy dispersive x-ray (EDX) spectra. Co concentrations are varied at 0.18, 0.33, and 0.68 at. % using pure TiO{sub 2} as the reference. X-ray diffraction (XRD) spectra show that the TiO{sub 2}:Co layer have a rutile phase. Further analysis of this structure has been performed by using room temperature spectroscopic ellipsometry (SE) measurements in the energy range of 0.5 - 6.5 eV. This optical response shows the unique feature of significantly high density fringe especially below the band gap energy region (lower than 3.3 eV) in contrast to the conventional TiO{sub 2} thin film structure. This unique feature is interpreted as a dominant contribution of the vertical interfaces at columnar boundaries towards reflected light from the sample. The evolution of Ψ and Δ will be discussed as the function of Co concentration and some optical properties will be extracted after reasonably well data fitting by multilayer modelling. Furthermore, by comparing the SEmore » data from different measurement orientations, it has been shown that TiO{sub 2}:Co tends to be anisotropic. This study enables us to further evaluate structural properties through optical responses given by SE measurement.« less

Authors:
 [1];  [2]; ;  [1];  [3];  [3]
  1. Department of Physics, Institut Teknologi Bandung, Ganesha 10 Bandung 40132 (Indonesia)
  2. Department of Physics, Universitas Pendidikan Indonesia, Setiabudi 229, Bandung, 40154 Indonesia (Indonesia)
  3. (Singapore)
Publication Date:
OSTI Identifier:
22488929
Resource Type:
Journal Article
Journal Name:
AIP Conference Proceedings
Additional Journal Information:
Journal Volume: 1677; Journal Issue: 1; Conference: 5. international conference on mathematics and natural sciences, Bandung (Indonesia), 2-3 Nov 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ANISOTROPY; CHEMICAL VAPOR DEPOSITION; COMPARATIVE EVALUATIONS; CONCENTRATION RATIO; ELLIPSOMETRY; INTERFACES; LAYERS; OPTICAL PROPERTIES; ORGANOMETALLIC COMPOUNDS; RUTILE; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; TEMPERATURE RANGE 0273-0400 K; THIN FILMS; TITANIUM OXIDES; VISIBLE RADIATION; X-RAY DIFFRACTION

Citation Formats

Anggraeni, G. P., Saripudin, A., Rusydi, A., Darma, Y., E-mail: yudi@fi.itb.ac.id, Singapore Synchrotron Light Source, National University of Singapore, 5 Research Link, Singapore 117603, and NUSNNI-Nanocore, Department of Physics, National University of Singapore, 2 Science Drive 3, Singapore 117542. Optical response of columnar TiO{sub 2}:Co on Si substrate. United States: N. p., 2015. Web. doi:10.1063/1.4930714.
Anggraeni, G. P., Saripudin, A., Rusydi, A., Darma, Y., E-mail: yudi@fi.itb.ac.id, Singapore Synchrotron Light Source, National University of Singapore, 5 Research Link, Singapore 117603, & NUSNNI-Nanocore, Department of Physics, National University of Singapore, 2 Science Drive 3, Singapore 117542. Optical response of columnar TiO{sub 2}:Co on Si substrate. United States. doi:10.1063/1.4930714.
Anggraeni, G. P., Saripudin, A., Rusydi, A., Darma, Y., E-mail: yudi@fi.itb.ac.id, Singapore Synchrotron Light Source, National University of Singapore, 5 Research Link, Singapore 117603, and NUSNNI-Nanocore, Department of Physics, National University of Singapore, 2 Science Drive 3, Singapore 117542. Wed . "Optical response of columnar TiO{sub 2}:Co on Si substrate". United States. doi:10.1063/1.4930714.
@article{osti_22488929,
title = {Optical response of columnar TiO{sub 2}:Co on Si substrate},
author = {Anggraeni, G. P. and Saripudin, A. and Rusydi, A. and Darma, Y., E-mail: yudi@fi.itb.ac.id and Singapore Synchrotron Light Source, National University of Singapore, 5 Research Link, Singapore 117603 and NUSNNI-Nanocore, Department of Physics, National University of Singapore, 2 Science Drive 3, Singapore 117542},
abstractNote = {Vertically arranged columnar TiO{sub 2}:Co structure has been deposited on Si (100) substrate using the metal organic chemical vapor deposition (MOCVD) technique. SEM images confirm the columnar structure of the TiO{sub 2}:Co layer on Si (100). Concentration of the Co dopant has been defined by means of the energy dispersive x-ray (EDX) spectra. Co concentrations are varied at 0.18, 0.33, and 0.68 at. % using pure TiO{sub 2} as the reference. X-ray diffraction (XRD) spectra show that the TiO{sub 2}:Co layer have a rutile phase. Further analysis of this structure has been performed by using room temperature spectroscopic ellipsometry (SE) measurements in the energy range of 0.5 - 6.5 eV. This optical response shows the unique feature of significantly high density fringe especially below the band gap energy region (lower than 3.3 eV) in contrast to the conventional TiO{sub 2} thin film structure. This unique feature is interpreted as a dominant contribution of the vertical interfaces at columnar boundaries towards reflected light from the sample. The evolution of Ψ and Δ will be discussed as the function of Co concentration and some optical properties will be extracted after reasonably well data fitting by multilayer modelling. Furthermore, by comparing the SE data from different measurement orientations, it has been shown that TiO{sub 2}:Co tends to be anisotropic. This study enables us to further evaluate structural properties through optical responses given by SE measurement.},
doi = {10.1063/1.4930714},
journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 1677,
place = {United States},
year = {2015},
month = {9}
}