Influence of substrate temperature and post annealing of CuGaO{sub 2} thin films on optical and structural properties

Journal Article · Fri Aug 28 00:00:00 EDT 2015 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4928837· OSTI ID:22488766

Bakar, Muhammad Hafiz Abu; Li, Lam Mui; Salleh, Saafie; Alias, Afishah ^[1]; Mohamad, Khairul Anuar; Sulaiman, Salina ^[2]

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1. Faculty of Science and Natural Resources, Universiti Malaysia Sabah, 88999, Kota Kinabalu, Sabah (Malaysia)
2. Faculty of Engineering, Universiti Malaysia Sabah, 88999 Kota Kinabalu, Sabah (Malaysia)

A transparent p-type thin film CuGaO{sub 2} was deposited by using RF sputtering deposition method on plastic (PET) and glass substrate. The characteristics of the film is investigated. The thin film was deposited at temperature range from 50-250°C and the pressure inside the chamber is 1.0×10{sup −2} Torr and Argon gas was used as a working gas. The RF power is set to 100 W. The thickness of thin film is 300nm. In this experiment the transparency of the thin film is more than 70% for the visible light region. The band gap obtain is between 3.3 to 3.5 eV. The details of the results will be discussed in the conference.

• OSTI ID: 22488766
• Journal Information: AIP Conference Proceedings, Vol. 1674, Issue 1; Conference: ICASIT2015: International conference on applied sciences and industrial technology, Negeri Sembilan (Malaysia), 24-26 Feb 2015; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANNEALING
ARGON
DEPOSITION
EV RANGE
GLASS
OPACITY
PLASTICS
POSITRON COMPUTED TOMOGRAPHY
PRESSURE DEPENDENCE
P-TYPE CONDUCTORS
SPUTTERING
SUBSTRATES
TEMPERATURE DEPENDENCE
THIN FILMS
VISIBLE RADIATION