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Title: Modular apparatus for electrostatic actuation of common atomic force microscope cantilevers

Abstract

Piezoelectric actuation of atomic force microscope (AFM) cantilevers often suffers from spurious mechanical resonances in the loop between the signal driving the cantilever and the actual tip motion. These spurious resonances can reduce the accuracy of AFM measurements and in some cases completely obscure the cantilever response. To address these limitations, we developed a specialized AFM cantilever holder for electrostatic actuation of AFM cantilevers. The holder contains electrical contacts for the AFM cantilever chip, as well as an electrode (or electrodes) that may be precisely positioned with respect to the back of the cantilever. By controlling the voltages on the AFM cantilever and the actuation electrode(s), an electrostatic force is applied directly to the cantilever, providing a near-ideal transfer function from drive signal to tip motion. We demonstrate both static and dynamic actuations, achieved through the application of direct current and alternating current voltage schemes, respectively. As an example application, we explore contact resonance atomic force microscopy, which is a technique for measuring the mechanical properties of surfaces on the sub-micron length scale. Using multiple electrodes, we also show that the torsional resonances of the AFM cantilever may be excited electrostatically, opening the door for advanced dynamic lateral force measurementsmore » with improved accuracy and precision.« less

Authors:
 [1]
  1. Center for Nanoscale Science and Technology, National Institute of Standards and Technology, Gaithersburg, Maryland 20899 (United States)
Publication Date:
OSTI Identifier:
22482715
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 86; Journal Issue: 7; Other Information: (c) 2015 Author(s); Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0034-6748
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ACCURACY; ALTERNATING CURRENT; ATOMIC FORCE MICROSCOPY; DIRECT CURRENT; ELECTRIC CONTACTS; ELECTRIC POTENTIAL; ELECTRODES; LENGTH; MECHANICAL PROPERTIES; PIEZOELECTRICITY; RESONANCE; SIGNALS; SURFACES; TRANSFER FUNCTIONS

Citation Formats

Long, Christian J., E-mail: christian.long@nist.gov, Maryland Nanocenter, University of Maryland, College Park, Maryland 20742, and Cannara, Rachel J. Modular apparatus for electrostatic actuation of common atomic force microscope cantilevers. United States: N. p., 2015. Web. doi:10.1063/1.4926431.
Long, Christian J., E-mail: christian.long@nist.gov, Maryland Nanocenter, University of Maryland, College Park, Maryland 20742, & Cannara, Rachel J. Modular apparatus for electrostatic actuation of common atomic force microscope cantilevers. United States. doi:10.1063/1.4926431.
Long, Christian J., E-mail: christian.long@nist.gov, Maryland Nanocenter, University of Maryland, College Park, Maryland 20742, and Cannara, Rachel J. Wed . "Modular apparatus for electrostatic actuation of common atomic force microscope cantilevers". United States. doi:10.1063/1.4926431.
@article{osti_22482715,
title = {Modular apparatus for electrostatic actuation of common atomic force microscope cantilevers},
author = {Long, Christian J., E-mail: christian.long@nist.gov and Maryland Nanocenter, University of Maryland, College Park, Maryland 20742 and Cannara, Rachel J.},
abstractNote = {Piezoelectric actuation of atomic force microscope (AFM) cantilevers often suffers from spurious mechanical resonances in the loop between the signal driving the cantilever and the actual tip motion. These spurious resonances can reduce the accuracy of AFM measurements and in some cases completely obscure the cantilever response. To address these limitations, we developed a specialized AFM cantilever holder for electrostatic actuation of AFM cantilevers. The holder contains electrical contacts for the AFM cantilever chip, as well as an electrode (or electrodes) that may be precisely positioned with respect to the back of the cantilever. By controlling the voltages on the AFM cantilever and the actuation electrode(s), an electrostatic force is applied directly to the cantilever, providing a near-ideal transfer function from drive signal to tip motion. We demonstrate both static and dynamic actuations, achieved through the application of direct current and alternating current voltage schemes, respectively. As an example application, we explore contact resonance atomic force microscopy, which is a technique for measuring the mechanical properties of surfaces on the sub-micron length scale. Using multiple electrodes, we also show that the torsional resonances of the AFM cantilever may be excited electrostatically, opening the door for advanced dynamic lateral force measurements with improved accuracy and precision.},
doi = {10.1063/1.4926431},
journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 7,
volume = 86,
place = {United States},
year = {2015},
month = {7}
}