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Title: Formation of conductive copper lines by femtosecond laser irradiation of copper nitride film on plastic substrates

Abstract

In this paper, we report a simple method to form conductive copper lines by scanning a single-beam femtosecond pulse laser on a plastic substrate covered with copper nitride (Cu{sub 3}N) film. The Cu{sub 3}N films were prepared by DC magnetron sputtering in the presence of an Ar + N{sub 2} atmosphere at 100 °C. The influence of the laser power and scanning speed on the formed copper line width, surface features, and morphology was analyzed by means of optical microscopy, X-ray diffraction, non-contact 3D profilometer, and scanning electron microscopy. The experimental results demonstrate that low laser power and low scanning speed favor the formation of uniform and flat Cu lines. After process optimization, copper lines with a width less than 5 μm were obtained, which provides an attractive application prospect in the field of flexible electronic devices.

Authors:
 [1];  [2];  [3];  [3];  [2];  [3];  [3];  [2];  [3];  [3]
  1. Center for Low-Dimensional Materials, Micro-Nano Devices and Systems, Changzhou University, Changzhou 213164, Jiangsu (China)
  2. Jiangsu Collaborative Innovation Center of Photovolatic Science and Engineering, Changzhou University, Changzhou 213164, Jiangsu (China)
  3. (China)
Publication Date:
OSTI Identifier:
22475758
Resource Type:
Journal Article
Journal Name:
Materials Research Bulletin
Additional Journal Information:
Journal Volume: 65; Other Information: Copyright (c) 2015 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0025-5408
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; COPPER; COPPER NITRIDES; FILMS; LASER RADIATION; LINE WIDTHS; MAGNETRONS; OPTICAL MICROSCOPY; OPTIMIZATION; SCANNING ELECTRON MICROSCOPY; SPUTTERING; SUBSTRATES; SURFACES; X-RAY DIFFRACTION

Citation Formats

Xu, Xiaodong, Yuan, Ningyi, E-mail: nyyuan@cczu.edu.cn, Center for Low-Dimensional Materials, Micro-Nano Devices and Systems, Changzhou University, Changzhou 213164, Jiangsu, Jiangsu Key Laboratory for Solar Cell Materials and Technology, Changzhou University, Changzhou 213164, Jiangsu, Qiu, Jianhua, Center for Low-Dimensional Materials, Micro-Nano Devices and Systems, Changzhou University, Changzhou 213164, Jiangsu, Jiangsu Key Laboratory for Solar Cell Materials and Technology, Changzhou University, Changzhou 213164, Jiangsu, Ding, Jianning, E-mail: dingjn@cczu.edu.cn, Center for Low-Dimensional Materials, Micro-Nano Devices and Systems, Changzhou University, Changzhou 213164, Jiangsu, and Jiangsu Key Laboratory for Solar Cell Materials and Technology, Changzhou University, Changzhou 213164, Jiangsu. Formation of conductive copper lines by femtosecond laser irradiation of copper nitride film on plastic substrates. United States: N. p., 2015. Web. doi:10.1016/J.MATERRESBULL.2015.01.029.
Xu, Xiaodong, Yuan, Ningyi, E-mail: nyyuan@cczu.edu.cn, Center for Low-Dimensional Materials, Micro-Nano Devices and Systems, Changzhou University, Changzhou 213164, Jiangsu, Jiangsu Key Laboratory for Solar Cell Materials and Technology, Changzhou University, Changzhou 213164, Jiangsu, Qiu, Jianhua, Center for Low-Dimensional Materials, Micro-Nano Devices and Systems, Changzhou University, Changzhou 213164, Jiangsu, Jiangsu Key Laboratory for Solar Cell Materials and Technology, Changzhou University, Changzhou 213164, Jiangsu, Ding, Jianning, E-mail: dingjn@cczu.edu.cn, Center for Low-Dimensional Materials, Micro-Nano Devices and Systems, Changzhou University, Changzhou 213164, Jiangsu, & Jiangsu Key Laboratory for Solar Cell Materials and Technology, Changzhou University, Changzhou 213164, Jiangsu. Formation of conductive copper lines by femtosecond laser irradiation of copper nitride film on plastic substrates. United States. doi:10.1016/J.MATERRESBULL.2015.01.029.
Xu, Xiaodong, Yuan, Ningyi, E-mail: nyyuan@cczu.edu.cn, Center for Low-Dimensional Materials, Micro-Nano Devices and Systems, Changzhou University, Changzhou 213164, Jiangsu, Jiangsu Key Laboratory for Solar Cell Materials and Technology, Changzhou University, Changzhou 213164, Jiangsu, Qiu, Jianhua, Center for Low-Dimensional Materials, Micro-Nano Devices and Systems, Changzhou University, Changzhou 213164, Jiangsu, Jiangsu Key Laboratory for Solar Cell Materials and Technology, Changzhou University, Changzhou 213164, Jiangsu, Ding, Jianning, E-mail: dingjn@cczu.edu.cn, Center for Low-Dimensional Materials, Micro-Nano Devices and Systems, Changzhou University, Changzhou 213164, Jiangsu, and Jiangsu Key Laboratory for Solar Cell Materials and Technology, Changzhou University, Changzhou 213164, Jiangsu. Fri . "Formation of conductive copper lines by femtosecond laser irradiation of copper nitride film on plastic substrates". United States. doi:10.1016/J.MATERRESBULL.2015.01.029.
@article{osti_22475758,
title = {Formation of conductive copper lines by femtosecond laser irradiation of copper nitride film on plastic substrates},
author = {Xu, Xiaodong and Yuan, Ningyi, E-mail: nyyuan@cczu.edu.cn and Center for Low-Dimensional Materials, Micro-Nano Devices and Systems, Changzhou University, Changzhou 213164, Jiangsu and Jiangsu Key Laboratory for Solar Cell Materials and Technology, Changzhou University, Changzhou 213164, Jiangsu and Qiu, Jianhua and Center for Low-Dimensional Materials, Micro-Nano Devices and Systems, Changzhou University, Changzhou 213164, Jiangsu and Jiangsu Key Laboratory for Solar Cell Materials and Technology, Changzhou University, Changzhou 213164, Jiangsu and Ding, Jianning, E-mail: dingjn@cczu.edu.cn and Center for Low-Dimensional Materials, Micro-Nano Devices and Systems, Changzhou University, Changzhou 213164, Jiangsu and Jiangsu Key Laboratory for Solar Cell Materials and Technology, Changzhou University, Changzhou 213164, Jiangsu},
abstractNote = {In this paper, we report a simple method to form conductive copper lines by scanning a single-beam femtosecond pulse laser on a plastic substrate covered with copper nitride (Cu{sub 3}N) film. The Cu{sub 3}N films were prepared by DC magnetron sputtering in the presence of an Ar + N{sub 2} atmosphere at 100 °C. The influence of the laser power and scanning speed on the formed copper line width, surface features, and morphology was analyzed by means of optical microscopy, X-ray diffraction, non-contact 3D profilometer, and scanning electron microscopy. The experimental results demonstrate that low laser power and low scanning speed favor the formation of uniform and flat Cu lines. After process optimization, copper lines with a width less than 5 μm were obtained, which provides an attractive application prospect in the field of flexible electronic devices.},
doi = {10.1016/J.MATERRESBULL.2015.01.029},
journal = {Materials Research Bulletin},
issn = {0025-5408},
number = ,
volume = 65,
place = {United States},
year = {2015},
month = {5}
}