Growth of crystalline ZnO films on the nitridated (0001) sapphire surface
Journal Article
·
· Crystallography Reports
- Russian Academy of Sciences, Shubnikov Institute of Crystallography (Russian Federation)
- Dagestan State University (Russian Federation)
- National Academy of Sciences of Ukraine, Institute for Single Crystals (Ukraine)
The surface morphology and structure of (0001) sapphire substrates subjected to thermochemical nitridation in a mixture of N{sub 2}, CO, and H{sub 2} gases are investigated by electron and probe microscopy and X-ray and electron diffraction. It is shown that an aluminum nitride layer is formed on the substrate surface and heteroepitaxial ZnO films deposited onto such substrates by magnetron sputtering have a higher quality when compared with films grown on sapphire.
- OSTI ID:
- 22472236
- Journal Information:
- Crystallography Reports, Vol. 60, Issue 4; Other Information: Copyright (c) 2015 Pleiades Publishing, Inc.; Country of input: International Atomic Energy Agency (IAEA); ISSN 1063-7745
- Country of Publication:
- United States
- Language:
- English
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