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Title: Formation of Si nanocrystals in multilayered nanoperiodic Al{sub 2}O{sub 3}/SiO{sub x}/Al{sub 2}O{sub 3}/SiO{sub x}/.../Si(100) structures: Synchrotron and photoluminescence data

Abstract

The results of X-ray absorption near-edge structure spectroscopy data obtained with synchrotron radiation for multilayered nanoperiodic Al{sub 2}O{sub 3}/SiO{sub x}/Al{sub 2}O{sub 3}/SiO{sub x}/.../Si(100) structures annealed at temperatures of 500–1100°C are reported. The data show that, upon high-temperature annealing (∼1100°C), the structures are modified. The modification is attributed to the formation of Si nanocrystals in deep layers of the structures. At the same time, the structures exhibit size-dependent high-intensity photoluminescence in the photon-energy range 1.4–1.52 eV.

Authors:
; ; ; ; ;  [1]; ; ; ;  [2];  [1]
  1. Voronezh State University (Russian Federation)
  2. Lobachevsky State University of Nizhni Novgorod (Russian Federation)
Publication Date:
OSTI Identifier:
22470039
Resource Type:
Journal Article
Resource Relation:
Journal Name: Semiconductors; Journal Volume: 49; Journal Issue: 3; Other Information: Copyright (c) 2015 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY; ABSORPTION; ABSORPTION SPECTROSCOPY; ALUMINIUM OXIDES; ANNEALING; EV RANGE; HETEROJUNCTIONS; LAYERS; NANOSTRUCTURES; PHOTOLUMINESCENCE; PHOTONS; SILICON; SILICON OXIDES; SYNCHROTRON RADIATION; X-RAY SPECTROSCOPY

Citation Formats

Turishchev, S. Yu., E-mail: tsu@phys.vsu.ru, Terekhov, V. A., Koyuda, D. A., Spirin, D. E., Parinova, E. V., Nesterov, D. N., Grachev, D. A., Karabanova, I. A., Ershov, A. V., Mashin, A. I., and Domashevskaya, E. P.. Formation of Si nanocrystals in multilayered nanoperiodic Al{sub 2}O{sub 3}/SiO{sub x}/Al{sub 2}O{sub 3}/SiO{sub x}/.../Si(100) structures: Synchrotron and photoluminescence data. United States: N. p., 2015. Web. doi:10.1134/S1063782615030227.
Turishchev, S. Yu., E-mail: tsu@phys.vsu.ru, Terekhov, V. A., Koyuda, D. A., Spirin, D. E., Parinova, E. V., Nesterov, D. N., Grachev, D. A., Karabanova, I. A., Ershov, A. V., Mashin, A. I., & Domashevskaya, E. P.. Formation of Si nanocrystals in multilayered nanoperiodic Al{sub 2}O{sub 3}/SiO{sub x}/Al{sub 2}O{sub 3}/SiO{sub x}/.../Si(100) structures: Synchrotron and photoluminescence data. United States. doi:10.1134/S1063782615030227.
Turishchev, S. Yu., E-mail: tsu@phys.vsu.ru, Terekhov, V. A., Koyuda, D. A., Spirin, D. E., Parinova, E. V., Nesterov, D. N., Grachev, D. A., Karabanova, I. A., Ershov, A. V., Mashin, A. I., and Domashevskaya, E. P.. Sun . "Formation of Si nanocrystals in multilayered nanoperiodic Al{sub 2}O{sub 3}/SiO{sub x}/Al{sub 2}O{sub 3}/SiO{sub x}/.../Si(100) structures: Synchrotron and photoluminescence data". United States. doi:10.1134/S1063782615030227.
@article{osti_22470039,
title = {Formation of Si nanocrystals in multilayered nanoperiodic Al{sub 2}O{sub 3}/SiO{sub x}/Al{sub 2}O{sub 3}/SiO{sub x}/.../Si(100) structures: Synchrotron and photoluminescence data},
author = {Turishchev, S. Yu., E-mail: tsu@phys.vsu.ru and Terekhov, V. A. and Koyuda, D. A. and Spirin, D. E. and Parinova, E. V. and Nesterov, D. N. and Grachev, D. A. and Karabanova, I. A. and Ershov, A. V. and Mashin, A. I. and Domashevskaya, E. P.},
abstractNote = {The results of X-ray absorption near-edge structure spectroscopy data obtained with synchrotron radiation for multilayered nanoperiodic Al{sub 2}O{sub 3}/SiO{sub x}/Al{sub 2}O{sub 3}/SiO{sub x}/.../Si(100) structures annealed at temperatures of 500–1100°C are reported. The data show that, upon high-temperature annealing (∼1100°C), the structures are modified. The modification is attributed to the formation of Si nanocrystals in deep layers of the structures. At the same time, the structures exhibit size-dependent high-intensity photoluminescence in the photon-energy range 1.4–1.52 eV.},
doi = {10.1134/S1063782615030227},
journal = {Semiconductors},
number = 3,
volume = 49,
place = {United States},
year = {Sun Mar 15 00:00:00 EDT 2015},
month = {Sun Mar 15 00:00:00 EDT 2015}
}