Effects of thermal treatment on the Mg{sub x}Zn{sub 1−x}O films and fabrication of visible-blind and solar-blind ultraviolet photodetectors

Journal Article · Mon Dec 15 00:00:00 EST 2014 · Materials Research Bulletin

DOI:https://doi.org/10.1016/J.MATERRESBULL.2014.08.021· OSTI ID:22420653

Tian, Chunguang ^[1]; Jiang, Dayong ^[1]; Tan, Zhendong ^[2]; Duan, Qian; Liu, Rusheng; Sun, Long; Qin, Jieming; Hou, Jianhua; Gao, Shang; Liang, Qingcheng; Zhao, Jianxun ^[1]

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1. School of Materials Science and Engineering, Changchun University of Science and Technology, Changchun 130022 (China)
2. The Metrology Technology Institute of Jilin, Changchun 132013 (China)

Highlights: • Single-phase wurtzite/cubic Mg{sub x}Zn{sub 1−x}O films were grown by RF magnetron sputtering technique. • We focus on the red-shift caused by annealing the Mg{sub x}Zn{sub 1−x}O films. • MSM-structured visible-blind and solar-blind UV photodetectors were fabricated. - Abstract: A series of single-phase Mg{sub x}Zn{sub 1−x}O films with different Mg contents were prepared on quartz substrates by RF magnetron sputtering technique using different MgZnO targets, and annealed under the atmospheric environment. The absorption edges of Mg{sub x}Zn{sub 1−x}O films can cover the whole near ultraviolet and even the whole solar-blind spectra range, and the solar-blind wurtzite/cubic Mg{sub x}Zn{sub 1−x}O films have been realized successfully by the same method. In addition, the absorption edges of annealed films shift to a long wavelength, which is caused by the diffusion of Zn atoms gathering at the surface during the thermal treatment process. Finally, the truly solar-blind metal-semiconductor-metal structured photodetectors based on wurtzite Mg{sub 0.445}Zn{sub 0.555}O and cubic Mg{sub 0.728}Zn{sub 0.272}O films were fabricated. The corresponding peak responsivities are 17 mA/W at 275 nm and 0.53 mA/W at 250 nm under a 120 V bias, respectively.

• OSTI ID: 22420653
• Journal Information: Materials Research Bulletin, Vol. 60; Other Information: Copyright (c) 2014 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA); ISSN 0025-5408
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ABSORPTION
ANNEALING
ATOMS
CONCENTRATION RATIO
CUBIC LATTICES
DIFFUSION
MAGNESIUM COMPOUNDS
OPTICAL PROPERTIES
PHOTODETECTORS
QUARTZ
RED SHIFT
SEMICONDUCTOR MATERIALS
SPUTTERING
SUBSTRATES
THIN FILMS
ULTRAVIOLET RADIATION
X-RAY DIFFRACTION
ZINC OXIDES