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Title: Order within disorder: The atomic structure of ion-beam sputtered amorphous tantala (a-Ta{sub 2}O{sub 5})

Abstract

Amorphous tantala (a-Ta{sub 2}O{sub 5}) is a technologically important material often used in high-performance coatings. Understanding this material at the atomic level provides a way to further improve performance. This work details extended X-ray absorption fine structure measurements of a-Ta{sub 2}O{sub 5} coatings, where high-quality experimental data and theoretical fits have allowed a detailed interpretation of the nearest-neighbor distributions. It was found that the tantalum atom is surrounded by four shells of atoms in sequence; oxygen, tantalum, oxygen, and tantalum. A discussion is also included on how these models can be interpreted within the context of published crystalline Ta{sub 2}O{sub 5} and other a-T{sub 2}O{sub 5} studies.

Authors:
; ; ; ; ;  [1]; ;  [2]; ;  [3]; ;  [4]; ; ; ;  [5]
  1. E. L. Ginzton Laboratory, Stanford University, Stanford, California 94305 (United States)
  2. LIGO Laboratory, California Institute of Technology, Pasadena, California 91125 (United States)
  3. Department of Geological and Environmental Sciences, Stanford University, Stanford, California 94305 (United States)
  4. Stanford Synchrotron Radiation Lightsource, SLAC National Accelerator Laboratory, Menlo Park, California 94025 (United States)
  5. SUPA, School of Physics and Astronomy, University of Glasgow, Glasgow G12 8QQ (United Kingdom)
Publication Date:
OSTI Identifier:
22415258
Resource Type:
Journal Article
Resource Relation:
Journal Name: APL materials; Journal Volume: 3; Journal Issue: 3; Other Information: (c) 2015 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ABSORPTION SPECTROSCOPY; AMORPHOUS STATE; COATINGS; CRYSTALS; FINE STRUCTURE; OXYGEN; PERFORMANCE; SPUTTERING; TANTALUM; TANTALUM OXIDES; X-RAY SPECTROSCOPY

Citation Formats

Bassiri, Riccardo, E-mail: rbassiri@stanford.edu, Liou, Franklin, Lin, Angie C., Byer, Robert L., Route, Roger K., Fejer, Martin M., Abernathy, Matthew R., Gustafson, Eric K., Kim, Namjun, Stebbins, Jonathan F., Mehta, Apurva, Shyam, Badri, Hart, Martin, MacLaren, Ian, Martin, Iain W., and Rowan, Sheila. Order within disorder: The atomic structure of ion-beam sputtered amorphous tantala (a-Ta{sub 2}O{sub 5}). United States: N. p., 2015. Web. doi:10.1063/1.4913586.
Bassiri, Riccardo, E-mail: rbassiri@stanford.edu, Liou, Franklin, Lin, Angie C., Byer, Robert L., Route, Roger K., Fejer, Martin M., Abernathy, Matthew R., Gustafson, Eric K., Kim, Namjun, Stebbins, Jonathan F., Mehta, Apurva, Shyam, Badri, Hart, Martin, MacLaren, Ian, Martin, Iain W., & Rowan, Sheila. Order within disorder: The atomic structure of ion-beam sputtered amorphous tantala (a-Ta{sub 2}O{sub 5}). United States. doi:10.1063/1.4913586.
Bassiri, Riccardo, E-mail: rbassiri@stanford.edu, Liou, Franklin, Lin, Angie C., Byer, Robert L., Route, Roger K., Fejer, Martin M., Abernathy, Matthew R., Gustafson, Eric K., Kim, Namjun, Stebbins, Jonathan F., Mehta, Apurva, Shyam, Badri, Hart, Martin, MacLaren, Ian, Martin, Iain W., and Rowan, Sheila. Sun . "Order within disorder: The atomic structure of ion-beam sputtered amorphous tantala (a-Ta{sub 2}O{sub 5})". United States. doi:10.1063/1.4913586.
@article{osti_22415258,
title = {Order within disorder: The atomic structure of ion-beam sputtered amorphous tantala (a-Ta{sub 2}O{sub 5})},
author = {Bassiri, Riccardo, E-mail: rbassiri@stanford.edu and Liou, Franklin and Lin, Angie C. and Byer, Robert L. and Route, Roger K. and Fejer, Martin M. and Abernathy, Matthew R. and Gustafson, Eric K. and Kim, Namjun and Stebbins, Jonathan F. and Mehta, Apurva and Shyam, Badri and Hart, Martin and MacLaren, Ian and Martin, Iain W. and Rowan, Sheila},
abstractNote = {Amorphous tantala (a-Ta{sub 2}O{sub 5}) is a technologically important material often used in high-performance coatings. Understanding this material at the atomic level provides a way to further improve performance. This work details extended X-ray absorption fine structure measurements of a-Ta{sub 2}O{sub 5} coatings, where high-quality experimental data and theoretical fits have allowed a detailed interpretation of the nearest-neighbor distributions. It was found that the tantalum atom is surrounded by four shells of atoms in sequence; oxygen, tantalum, oxygen, and tantalum. A discussion is also included on how these models can be interpreted within the context of published crystalline Ta{sub 2}O{sub 5} and other a-T{sub 2}O{sub 5} studies.},
doi = {10.1063/1.4913586},
journal = {APL materials},
number = 3,
volume = 3,
place = {United States},
year = {Sun Mar 01 00:00:00 EST 2015},
month = {Sun Mar 01 00:00:00 EST 2015}
}