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Title: Effects of argon gas pressure on its metastable-state density in high-density plasmas

Abstract

The effect of argon gas pressure on its metastable density in inductively coupled plasmas (ICPs) is investigated by using the laser-induced fluorescence method. Our results show that the metastable-state density of argon varies with the gas pressure depending on the measurement position; the density decreases with the pressure at a position far from the ICP antenna, whereas it increases with the pressure at a position near the antenna. This contrast in the metastable-state density trend with the pressure is explained by considering the electron temperature variations at the two measurement positions. The theoretical interpretation and calculation using a global model are also addressed in detail in this paper.

Authors:
;  [1];  [2]
  1. Center for Vacuum Technology, Korea Research Institute of Standards and Science, Daejeon 305-306 (Korea, Republic of)
  2. Department of Physics, Chungnam National University, Daejeon 305-764 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22410358
Resource Type:
Journal Article
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Volume: 22; Journal Issue: 5; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1070-664X
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ANTENNAS; ARGON; ELECTRON TEMPERATURE; FLUORESCENCE; LASERS; METASTABLE STATES; PLASMA DENSITY

Citation Formats

Seo, B. H., Kim, J. H., E-mail: jhkim86@kriss.re.kr, and You, S. J., E-mail: sjyou@cnu.ac.kr. Effects of argon gas pressure on its metastable-state density in high-density plasmas. United States: N. p., 2015. Web. doi:10.1063/1.4921936.
Seo, B. H., Kim, J. H., E-mail: jhkim86@kriss.re.kr, & You, S. J., E-mail: sjyou@cnu.ac.kr. Effects of argon gas pressure on its metastable-state density in high-density plasmas. United States. doi:10.1063/1.4921936.
Seo, B. H., Kim, J. H., E-mail: jhkim86@kriss.re.kr, and You, S. J., E-mail: sjyou@cnu.ac.kr. Fri . "Effects of argon gas pressure on its metastable-state density in high-density plasmas". United States. doi:10.1063/1.4921936.
@article{osti_22410358,
title = {Effects of argon gas pressure on its metastable-state density in high-density plasmas},
author = {Seo, B. H. and Kim, J. H., E-mail: jhkim86@kriss.re.kr and You, S. J., E-mail: sjyou@cnu.ac.kr},
abstractNote = {The effect of argon gas pressure on its metastable density in inductively coupled plasmas (ICPs) is investigated by using the laser-induced fluorescence method. Our results show that the metastable-state density of argon varies with the gas pressure depending on the measurement position; the density decreases with the pressure at a position far from the ICP antenna, whereas it increases with the pressure at a position near the antenna. This contrast in the metastable-state density trend with the pressure is explained by considering the electron temperature variations at the two measurement positions. The theoretical interpretation and calculation using a global model are also addressed in detail in this paper.},
doi = {10.1063/1.4921936},
journal = {Physics of Plasmas},
issn = {1070-664X},
number = 5,
volume = 22,
place = {United States},
year = {2015},
month = {5}
}