Understanding the early cycling evolution behaviors for phase change memory application

Journal Article · Fri Nov 28 00:00:00 EST 2014 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4902851· OSTI ID:22402704

Wang, Yuchan; Chen, Yifeng; Cai, Daolin; Cheng, Yan; Chen, Xiaogang; Wang, Yueqing; Xia, Mengjiao; Zhou, Mi; Li, Gezi; Zhang, Yiyun; Gao, Dan; Song, Zhitang ^[1]; Feng, Gaoming ^[2]

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1. State Key Laboratory of Functional Materials for Informatics and Nanotechnology Laboratory, Shanghai Institute of Micro-system and Information Technology, Chinese Academy of Sciences, Shanghai 200050 (China)
2. United Lab, Semiconductor Manfacturing International Corporation, Shanghai 201203 (China)

The RESET current of T-shaped phase change memory cells with 35 nm heating electrodes has been studied to understand the behavior of early cycling evolution. Results show that the RESET current has been significantly reduced after the early cycling evolution (1st RESET) operation. Compared the transmission electron microscope images, it is found that the hexagonal Ge{sub 2}Sb{sub 2}Te{sub 5} (GST) crystal grains are changed into the grains with face centered cubic structure after the early cycling evolution operation, which is taken as the major reason for the reduced RESET current, confirmed by a two-dimensional finite analysis and ab initio calculations.

• OSTI ID: 22402704
• Journal Information: Journal of Applied Physics, Vol. 116, Issue 20; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CRYSTALS
ELECTRODES
EVOLUTION
FCC LATTICES
HEATING
TRANSMISSION ELECTRON MICROSCOPY