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Title: Ion polarization behavior in alumina under pulsed gate bias stress

Abstract

Alkali metal ion incorporation in alumina significantly increases alumina capacitance by ion polarization. With high capacitance, ion-incorporated aluminas become promising high dielectric constant (high-k) gate dielectric materials in field-effect transistors (FETs) to enable reduced operating voltage, using oxide or organic semiconductors. Alumina capacitance can be manipulated by incorporation of alkali metal ions, including potassium (K{sup +}), sodium (Na{sup +}), and lithium (Li{sup +}), having different bond strengths with oxygen. To investigate the electrical stability of zinc tin oxide-based transistors using ion incorporated alumina as gate dielectrics, pulsed biases at different duty cycles (20%, 10%, and 2% representing 5 ms, 10 ms, and 50 ms periods, respectively) were applied to the gate electrode, sweeping the gate voltage over series of these cycles. We observed a particular bias stress-induced decrease of saturation field-effect mobility accompanied by threshold voltage shifts (ΔV{sub th}) in potassium and sodium-incorporated alumina (abbreviated as PA and SA)-based FETs at high duty cycle that persisted over multiple gate voltage sweeps, suggesting a possible creation of new defects in the semiconductor. This conclusion is also supported by the greater change in the mobility-capacitance (μC) product than in capacitance itself. Moreover, a more pronounced ΔV{sub th} over shorter times was observed in lithium-incorporated aluminamore » (abbreviated as LA)-based transistors, suggesting trapping of electrons in existing interfacial states. ΔV{sub th} from multiple gate voltage sweeps over time were fit to stretched exponential forms. All three dielectrics show good stability using 50-ms intervals (20-Hz frequencies), corresponding to 2% duty cycles.« less

Authors:
;
Publication Date:
OSTI Identifier:
22395762
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 106; Journal Issue: 11; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ALUMINIUM OXIDES; CAPACITANCE; DIELECTRIC MATERIALS; ELECTRONS; FIELD EFFECT TRANSISTORS; LITHIUM; LITHIUM IONS; ORGANIC SEMICONDUCTORS; PERMITTIVITY; POLARIZATION; POTASSIUM; POTASSIUM IONS; SODIUM; SODIUM IONS; TIN OXIDES; TRAPPING

Citation Formats

Liu, Yu, Diallo, Abdou Karim, and Katz, Howard E., E-mail: hekatz@jhu.edu. Ion polarization behavior in alumina under pulsed gate bias stress. United States: N. p., 2015. Web. doi:10.1063/1.4916227.
Liu, Yu, Diallo, Abdou Karim, & Katz, Howard E., E-mail: hekatz@jhu.edu. Ion polarization behavior in alumina under pulsed gate bias stress. United States. https://doi.org/10.1063/1.4916227
Liu, Yu, Diallo, Abdou Karim, and Katz, Howard E., E-mail: hekatz@jhu.edu. 2015. "Ion polarization behavior in alumina under pulsed gate bias stress". United States. https://doi.org/10.1063/1.4916227.
@article{osti_22395762,
title = {Ion polarization behavior in alumina under pulsed gate bias stress},
author = {Liu, Yu and Diallo, Abdou Karim and Katz, Howard E., E-mail: hekatz@jhu.edu},
abstractNote = {Alkali metal ion incorporation in alumina significantly increases alumina capacitance by ion polarization. With high capacitance, ion-incorporated aluminas become promising high dielectric constant (high-k) gate dielectric materials in field-effect transistors (FETs) to enable reduced operating voltage, using oxide or organic semiconductors. Alumina capacitance can be manipulated by incorporation of alkali metal ions, including potassium (K{sup +}), sodium (Na{sup +}), and lithium (Li{sup +}), having different bond strengths with oxygen. To investigate the electrical stability of zinc tin oxide-based transistors using ion incorporated alumina as gate dielectrics, pulsed biases at different duty cycles (20%, 10%, and 2% representing 5 ms, 10 ms, and 50 ms periods, respectively) were applied to the gate electrode, sweeping the gate voltage over series of these cycles. We observed a particular bias stress-induced decrease of saturation field-effect mobility accompanied by threshold voltage shifts (ΔV{sub th}) in potassium and sodium-incorporated alumina (abbreviated as PA and SA)-based FETs at high duty cycle that persisted over multiple gate voltage sweeps, suggesting a possible creation of new defects in the semiconductor. This conclusion is also supported by the greater change in the mobility-capacitance (μC) product than in capacitance itself. Moreover, a more pronounced ΔV{sub th} over shorter times was observed in lithium-incorporated alumina (abbreviated as LA)-based transistors, suggesting trapping of electrons in existing interfacial states. ΔV{sub th} from multiple gate voltage sweeps over time were fit to stretched exponential forms. All three dielectrics show good stability using 50-ms intervals (20-Hz frequencies), corresponding to 2% duty cycles.},
doi = {10.1063/1.4916227},
url = {https://www.osti.gov/biblio/22395762}, journal = {Applied Physics Letters},
issn = {0003-6951},
number = 11,
volume = 106,
place = {United States},
year = {Mon Mar 16 00:00:00 EDT 2015},
month = {Mon Mar 16 00:00:00 EDT 2015}
}