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Title: Design and development of an in-line sputtering system and process development of thin film multilayer neutron supermirrors

Abstract

Neutron supermirrors and supermirror polarizers are thin film multilayer based devices which are used for reflecting and polarizing neutrons in various neutron based experiments. In the present communication, the in-house development of a 9 m long in-line dc sputtering system has been described which is suitable for deposition of neutron supermirrors on large size (1500 mm × 150 mm) substrates and in large numbers. The optimisation process of deposition of Co and Ti thin film, Co/Ti periodic multilayers, and a-periodic supermirrors have also been described. The system has been used to deposit thin film multilayer supermirror polarizers which show high reflectivity up to a reasonably large critical wavevector transfer of ∼0.06 Å{sup −1} (corresponding to m = 2.5, i.e., 2.5 times critical wavevector transfer of natural Ni). The computer code for designing these supermirrors has also been developed in-house.

Authors:
; ; ; ;  [1]; ; ; ;  [2]; ; ;  [3]
  1. Atomic and Molecular Physics Division, Bhabha Atomic Research Centre, Mumbai 400 085 (India)
  2. Division of Remote Handling and Robotics, Bhabha Atomic Research Centre, Mumbai 400 085 (India)
  3. Solid State Physics Division, Bhabha Atomic Research Centre, Mumbai 400 085 (India)
Publication Date:
OSTI Identifier:
22392257
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 85; Journal Issue: 12; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0034-6748
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; COMMUNICATIONS; COMPUTER CODES; DEPOSITION; DESIGN; LAYERS; NEUTRONS; OPTIMIZATION; PERIODICITY; REFLECTIVITY; SPUTTERING; SUBSTRATES; THIN FILMS

Citation Formats

Biswas, A., Sampathkumar, R., Kumar, Ajaya, Bhattacharyya, D., Sahoo, N. K., Lagoo, K. D., Veerapur, R. D., Padmanabhan, M., Puri, R. K., Bhattacharya, Debarati, Singh, Surendra, and Basu, S. Design and development of an in-line sputtering system and process development of thin film multilayer neutron supermirrors. United States: N. p., 2014. Web. doi:10.1063/1.4902184.
Biswas, A., Sampathkumar, R., Kumar, Ajaya, Bhattacharyya, D., Sahoo, N. K., Lagoo, K. D., Veerapur, R. D., Padmanabhan, M., Puri, R. K., Bhattacharya, Debarati, Singh, Surendra, & Basu, S. Design and development of an in-line sputtering system and process development of thin film multilayer neutron supermirrors. United States. https://doi.org/10.1063/1.4902184
Biswas, A., Sampathkumar, R., Kumar, Ajaya, Bhattacharyya, D., Sahoo, N. K., Lagoo, K. D., Veerapur, R. D., Padmanabhan, M., Puri, R. K., Bhattacharya, Debarati, Singh, Surendra, and Basu, S. Mon . "Design and development of an in-line sputtering system and process development of thin film multilayer neutron supermirrors". United States. https://doi.org/10.1063/1.4902184.
@article{osti_22392257,
title = {Design and development of an in-line sputtering system and process development of thin film multilayer neutron supermirrors},
author = {Biswas, A. and Sampathkumar, R. and Kumar, Ajaya and Bhattacharyya, D. and Sahoo, N. K. and Lagoo, K. D. and Veerapur, R. D. and Padmanabhan, M. and Puri, R. K. and Bhattacharya, Debarati and Singh, Surendra and Basu, S.},
abstractNote = {Neutron supermirrors and supermirror polarizers are thin film multilayer based devices which are used for reflecting and polarizing neutrons in various neutron based experiments. In the present communication, the in-house development of a 9 m long in-line dc sputtering system has been described which is suitable for deposition of neutron supermirrors on large size (1500 mm × 150 mm) substrates and in large numbers. The optimisation process of deposition of Co and Ti thin film, Co/Ti periodic multilayers, and a-periodic supermirrors have also been described. The system has been used to deposit thin film multilayer supermirror polarizers which show high reflectivity up to a reasonably large critical wavevector transfer of ∼0.06 Å{sup −1} (corresponding to m = 2.5, i.e., 2.5 times critical wavevector transfer of natural Ni). The computer code for designing these supermirrors has also been developed in-house.},
doi = {10.1063/1.4902184},
url = {https://www.osti.gov/biblio/22392257}, journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 12,
volume = 85,
place = {United States},
year = {2014},
month = {12}
}