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Title: Stress engineering in GaN structures grown on Si(111) substrates by SiN masking layer application

Abstract

GaN layers without and with an in-situ SiN mask were grown by using metal organic vapor phase epitaxy for three different approaches used in GaN on silicon(111) growth, and the physical and optical properties of the GaN layers were studied. For each approach applied, GaN layers of 1.4 μm total thickness were grown, using silan SiH{sub 4} as Si source in order to grow Si{sub x}N{sub x} masking layer. The optical micrographs, scanning electron microscope images, and atomic force microscope images of the grown samples revealed cracks for samples without SiN mask, and micropits, which were characteristic for the samples grown with SiN mask. In situ reflectance signal traces were studied showing a decrease of layer coalescence time and higher degree of 3D growth mode for samples with SiN masking layer. Stress measurements were conducted by two methods—by recording micro-Raman spectra and ex-situ curvature radius measurement—additionally PLs spectra were obtained revealing blueshift of PL peak positions with increasing stress. The authors have shown that a SiN mask significantly improves physical and optical properties of GaN multilayer systems reducing stress in comparison to samples grown applying the same approaches but without SiN masking layer.

Authors:
; ; ;  [1];  [2]
  1. The Faculty of Microsystem Electronics and Photonics, Wrocaw University of Technology, Janiszewskiego 11/17, 50-372 Wroclaw (Poland)
  2. International Laser Center, Ilkovicova 3, 841-04 Bratislava 4 (Slovakia)
Publication Date:
OSTI Identifier:
22392200
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 33; Journal Issue: 4; Other Information: (c) 2015 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; ATOMIC FORCE MICROSCOPY; COALESCENCE; CRACKS; GALLIUM NITRIDES; IMAGES; LAYERS; MASKING; OPTICAL PROPERTIES; ORGANOMETALLIC COMPOUNDS; RAMAN SPECTRA; SCANNING ELECTRON MICROSCOPY; SILANES; SILICON NITRIDES; STRESSES; SUBSTRATES; THICKNESS; VAPOR PHASE EPITAXY

Citation Formats

Szymański, Tomasz, E-mail: tomasz.szymanski@pwr.edu.pl, Wośko, Mateusz, Paszkiewicz, Bogdan, Paszkiewicz, Regina, and Drzik, Milan. Stress engineering in GaN structures grown on Si(111) substrates by SiN masking layer application. United States: N. p., 2015. Web. doi:10.1116/1.4921581.
Szymański, Tomasz, E-mail: tomasz.szymanski@pwr.edu.pl, Wośko, Mateusz, Paszkiewicz, Bogdan, Paszkiewicz, Regina, & Drzik, Milan. Stress engineering in GaN structures grown on Si(111) substrates by SiN masking layer application. United States. doi:10.1116/1.4921581.
Szymański, Tomasz, E-mail: tomasz.szymanski@pwr.edu.pl, Wośko, Mateusz, Paszkiewicz, Bogdan, Paszkiewicz, Regina, and Drzik, Milan. 2015. "Stress engineering in GaN structures grown on Si(111) substrates by SiN masking layer application". United States. doi:10.1116/1.4921581.
@article{osti_22392200,
title = {Stress engineering in GaN structures grown on Si(111) substrates by SiN masking layer application},
author = {Szymański, Tomasz, E-mail: tomasz.szymanski@pwr.edu.pl and Wośko, Mateusz and Paszkiewicz, Bogdan and Paszkiewicz, Regina and Drzik, Milan},
abstractNote = {GaN layers without and with an in-situ SiN mask were grown by using metal organic vapor phase epitaxy for three different approaches used in GaN on silicon(111) growth, and the physical and optical properties of the GaN layers were studied. For each approach applied, GaN layers of 1.4 μm total thickness were grown, using silan SiH{sub 4} as Si source in order to grow Si{sub x}N{sub x} masking layer. The optical micrographs, scanning electron microscope images, and atomic force microscope images of the grown samples revealed cracks for samples without SiN mask, and micropits, which were characteristic for the samples grown with SiN mask. In situ reflectance signal traces were studied showing a decrease of layer coalescence time and higher degree of 3D growth mode for samples with SiN masking layer. Stress measurements were conducted by two methods—by recording micro-Raman spectra and ex-situ curvature radius measurement—additionally PLs spectra were obtained revealing blueshift of PL peak positions with increasing stress. The authors have shown that a SiN mask significantly improves physical and optical properties of GaN multilayer systems reducing stress in comparison to samples grown applying the same approaches but without SiN masking layer.},
doi = {10.1116/1.4921581},
journal = {Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films},
number = 4,
volume = 33,
place = {United States},
year = 2015,
month = 7
}
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