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Title: On the formation of copper nanoparticles in nanocluster aggregation source

Journal Article · · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
DOI:https://doi.org/10.1116/1.4917002· OSTI ID:22392181
; ;  [1]
  1. National Science Center, “Kharkiv Institute of Physics and Technology,” Akademichna str. 1, UA-61108 Kharkiv (Ukraine)

The influence of pressure and type of inert gas (Ar and Kr) on the morphology and size distribution of nanoparticles produced in a nanocluster source is studied experimentally. The experimental data are used to validate the model of cluster formation from a supersaturated atomic vapor in an inert buffer gas, which has been developed in our previous paper. The model predictions are in accordance with the experimental findings.

OSTI ID:
22392181
Journal Information:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Vol. 33, Issue 3; Other Information: (c) 2015 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 0734-2101
Country of Publication:
United States
Language:
English

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