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Title: Effects of high-temperature thermal annealing on the electronic properties of In-Ga-Zn oxide thin films

Abstract

Indium gallium zinc oxide (IGZO) thin films were deposited by radio-frequency magnetron sputtering at room-temperature. Then, thermal annealing was conducted to improve the structural ordering. X-ray diffraction and high-resolution transmission electron microscopy demonstrated that the as-deposited IGZO thin films were amorphous and crystallization occurred at 800 and 950 °C. As a result of crystallization at high temperature, the carrier concentration and the Hall mobility of IGZO thin films were sharply increased, which could be ascribed to the increased oxygen vacancies and improved structural ordering of the thin films.

Authors:
; ; ;  [1];  [2]
  1. State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an, Shaanxi 710049 (China)
  2. State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China and Department of Physics and Opt-electronic Engineering, Xi'an University of Arts and Science, Xi'an, Shaanxi 710065 (China)
Publication Date:
OSTI Identifier:
22392164
Resource Type:
Journal Article
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Volume: 33; Journal Issue: 2; Other Information: (c) 2015 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0734-2101
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ANNEALING; CRYSTALLIZATION; DEPOSITS; MAGNETRONS; RADIOWAVE RADIATION; SPUTTERING; TEMPERATURE RANGE 1000-4000 K; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X-RAY DIFFRACTION; ZINC OXIDES

Citation Formats

Li, Qin, Song, Zhong Xiao, Ma, Fei, E-mail: mafei@mail.xjtu.edu.cn, E-mail: liyhemail@gmail.com, Li, Yan Huai, E-mail: mafei@mail.xjtu.edu.cn, E-mail: liyhemail@gmail.com, and Xu, Ke Wei. Effects of high-temperature thermal annealing on the electronic properties of In-Ga-Zn oxide thin films. United States: N. p., 2015. Web. doi:10.1116/1.4908157.
Li, Qin, Song, Zhong Xiao, Ma, Fei, E-mail: mafei@mail.xjtu.edu.cn, E-mail: liyhemail@gmail.com, Li, Yan Huai, E-mail: mafei@mail.xjtu.edu.cn, E-mail: liyhemail@gmail.com, & Xu, Ke Wei. Effects of high-temperature thermal annealing on the electronic properties of In-Ga-Zn oxide thin films. United States. doi:10.1116/1.4908157.
Li, Qin, Song, Zhong Xiao, Ma, Fei, E-mail: mafei@mail.xjtu.edu.cn, E-mail: liyhemail@gmail.com, Li, Yan Huai, E-mail: mafei@mail.xjtu.edu.cn, E-mail: liyhemail@gmail.com, and Xu, Ke Wei. Sun . "Effects of high-temperature thermal annealing on the electronic properties of In-Ga-Zn oxide thin films". United States. doi:10.1116/1.4908157.
@article{osti_22392164,
title = {Effects of high-temperature thermal annealing on the electronic properties of In-Ga-Zn oxide thin films},
author = {Li, Qin and Song, Zhong Xiao and Ma, Fei, E-mail: mafei@mail.xjtu.edu.cn, E-mail: liyhemail@gmail.com and Li, Yan Huai, E-mail: mafei@mail.xjtu.edu.cn, E-mail: liyhemail@gmail.com and Xu, Ke Wei},
abstractNote = {Indium gallium zinc oxide (IGZO) thin films were deposited by radio-frequency magnetron sputtering at room-temperature. Then, thermal annealing was conducted to improve the structural ordering. X-ray diffraction and high-resolution transmission electron microscopy demonstrated that the as-deposited IGZO thin films were amorphous and crystallization occurred at 800 and 950 °C. As a result of crystallization at high temperature, the carrier concentration and the Hall mobility of IGZO thin films were sharply increased, which could be ascribed to the increased oxygen vacancies and improved structural ordering of the thin films.},
doi = {10.1116/1.4908157},
journal = {Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films},
issn = {0734-2101},
number = 2,
volume = 33,
place = {United States},
year = {2015},
month = {3}
}